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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Kok Lue Lacey, C. Talke, F.E. |
| Copyright Year | 1965 |
| Abstract | Ellipsometry is used to characterize the phase shift on reflection off carbon-overcoated sliders in order to accurately determine slider flying height with interferometry. A simplified analysis is used to approximate the phase shift based on a single ellipsometric measurement of the finished slider. A rigorous analysis indicates that for the overcoating systems studied herein, the flying height error introduced by the simplified analysis of phase shift on reflection was less than one nanometer. Experimental measurements of spacing with an overcoated slider resting on deposited bumps on a stationary disk indicate that the average measured spacing was within one nanometer of the bump height.< |
| Sponsorship | IEEE Magnetics Society |
| Starting Page | 4167 |
| Ending Page | 4169 |
| Page Count | 3 |
| File Size | 347649 |
| File Format | |
| ISSN | 00189464 |
| Volume Number | 30 |
| Issue Number | 6 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1994-11-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Optical surface waves Optical reflection Optical interferometry Glass Surface waves Ellipsometry Phase shifting interferometry Phase measurement Optical refraction Thickness measurement |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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