NDLI: A Low-Cost and Flexible Microplasma Generation Device to Create Hydrophobic/Hydrophilic Contrast on Nonflat Surfaces

Content Provider	IEEE Xplore Digital Library
Author	Yao-Jhen Yang Peng-Kai Kao Cheng-Che Hsu
Copyright Year	1992
Abstract	This letter presents a low-cost (<;0.25 USD per device), easy-to-fabricated, and flexible microplasma generation device (MGD), and the use of this device to perform surface patterning. This dielectric-barrier-discharge-type MGD is made of double-side copper clad laminates and the electrode patterns were fabricated by a printed circuit board fabrication-based method, which allows the patterning without lithographic processes with good feature transfer fidelity. The MGD was utilized to create hydrophilic/hydrophobic contrast by a maskless patterning process, either creating hydrophobic patterns on hydrophilic surfaces or hydrophilic pattern on hydrophobic surfaces with sub-millimeter spatial resolution. In the former case, the hydrophobic fluorocarbon polymer (FCP) patterns were deposited on glass using c-C4F8 and He plasmas. In the latter case, hydrophilic patterns were created on a FCP-coated glass substrate using the MGD operated in ambient air. We also demonstrated that the flexibility of the device enabled non-flat surface patterning.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1678
Ending Page	1680
Page Count	3
File Size	648792
File Format	PDF
ISSN	10577157
Volume Number	24
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface treatment Plasmas Substrates Glass Electrodes Fabrication Polymers polymerization. Fluorocarbon maskless patterning microplasma polymerization
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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