NDLI: A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS

Content Provider	IEEE Xplore Digital Library
Author	Krijnen, B. Swinkels, K.R. Brouwer, D.M. Abelmann, L. Herder, J.L.
Copyright Year	1992
Abstract	In this paper, we design, fabricate, and validate a large-stroke 3-degree-of-freedom (DOF) positioning stage with integrated displacement sensors for feedback control in a single-mask microelectromechanical systems (MEMS) fabrication process. Three equal shuttles exactly define the position of the stage in x, y, and Rz. The kinematic relation between the shuttle positions and the stage position is given by the geometric transfer function. By increasing the order of this geometric transfer function, the stage error can be reduced. Each shuttle consists of a flexure mechanism, a position sensor, and electrostatic comb drive actuators for actuation along a straight line. The range of motion of the stage is limited by electrostatic pull-in of these comb drives. Three parameters of the stage, the leafspring length, the eccentricity, and the tangential arm, have been varied to find their influence on the stage range of motion. These simulation results can be used to design stages with different specifications. Position control of the individual shuttles is applied to control the position of the stage. The stroke of the 3DOF stage is verified up to 161 μm in x, 175 μm in y, and 325 mrad in R_z. This exceeds the range of motion of existing stages.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1720
Ending Page	1729
Page Count	10
File Size	5418795
File Format	PDF
ISSN	10577157
Volume Number	24
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Electrostatics Resonant frequency Actuators Kinematics Thermal sensors position control. Comb-drive actuators thermal position sensors position control
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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