NDLI: Creep, Hysteresis, and Cross-Coupling Reduction in the High-Precision Positioning of the Piezoelectric Scanner Stage of an Atomic Force Microscope

Content Provider	IEEE Xplore Digital Library
Author	Habibullah Pota, H.R. Petersen, I.R. Rana, M.S.
Copyright Year	2002
Abstract	This paper presents the high-precision lateral positioning of a piezoelectric tube scanner (PTS) used in an atomic force microscope (AFM). The operation of the PTS is affected by various nonlinearities depending upon its operating conditions. An internal reference model-based optimal linear quadratic Gaussian (LQG) controller with a vibration compensator is designed and implemented on the AFM to reduce creep, hysteresis, induced vibration, and cross coupling. This proposed controller has integral action on the error state which makes it possible to track the reference signal and the vibration compensator achieves significant damping of the resonant modes of the PTS in the X- and Y-axes. It also compensates the cross coupling between the X-Y axes dynamics of the AFM system, reducing the artifacts instigated by the system dynamic behavior at high scan rates. The closed-loop frequency responses for both the axes have a high bandwidth. The experimental results are presented which demonstrate the efficacy of the proposed method.
Sponsorship	IEEE Nanotechnology Council
Starting Page	1125
Ending Page	1134
Page Count	10
File Size	4375305
File Format	PDF
ISSN	1536125X
Volume Number	12
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Vibrations Hysteresis Creep Electron tubes Mathematical model Resonant frequency Electrodes vibration compensator Atomic force microscope (AFM) creep hysteresis linear quadratic Gaussian (LQG) controller piezoelectric tube scanner (PTS) system identification
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Electrical and Electronic Engineering Computer Science Applications

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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