NDLI: Microfabrication and Characterization of W-Band Planar Helix Slow-Wave Structure With Straight-Edge Connections

Content Provider	IEEE Xplore Digital Library
Author	Ciersiang Chua Tsai, J.M. Aditya, S. Min Tang Soon Wee Ho Zhongxiang Shen Lei Wang
Copyright Year	1963
Abstract	A slow-wave structure (SWS) consisting of a planar helix with straight-edge connections and incorporating a coplanar waveguide feed has been designed for operation at W-band and has been fabricated using microfabrication technique. On-wafer cold measurements have been carried out on a number of fabricated SWSs, and the results are reported here for the first time. The parameters measured are return loss, attenuation, and phase velocity, and the results cover a frequency range of 70-100 GHz. Cold-test parameters of the SWS have been also obtained using simulations, and the effects of fabrication, such as surface roughness, have been accounted for by estimating effective conductivity of different parts of the microfabricated structures. The measured and simulated results match well. The effects of silicon wafer resistivity have been also discussed. Planar helical SWSs fabricated in this manner have application in traveling-wave tubes operating at millimeter wave and higher frequencies.
Sponsorship	IEEE Electron Devices Society
Starting Page	4098
Ending Page	4105
Page Count	8
File Size	874920
File Format	PDF
ISSN	00189383
Volume Number	58
Issue Number	11
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-11-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface roughness Rough surfaces Silicon Conductivity Metals Fabrication Bridges traveling-wave tube (TWT) Cold-test parameters electron devices lithography microstructure millimeter-wave measurements radio-frequency microelectromechanical systems slow-wave structure (SWS) surface roughness
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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