NDLI: Impact of Hot Carriers on nMOSFET Variability in 45- and 65-nm CMOS Technologies

Content Provider	IEEE Xplore Digital Library
Author	Magnone, P. Crupi, F. Wils, N. Jain, R. Tuinhout, H. Andricciola, P. Giusi, G. Fiegna, C.
Copyright Year	1963
Abstract	This paper examines the impact of hot carriers (HCs) on n-channel metal-oxide-semiconductor (MOS) field-effect transistor mismatch across the 45- and 65-nm complementary MOS technology generations. The reported statistical analysis is based on a large overall sample population of about 1000 transistors. HC stress introduces a source of variability in device electrical parameters due to the randomly generated charge traps in the gate dielectric or at the substrate/dielectric interface. The evolution of the threshold-voltage mismatch during an HC stress is well modeled by assuming a Poisson distribution of the induced charge traps with a nonuniform generation along the channel. Once the evolution of the HC-induced VT shift is known, a single parameter is able to accurately describe the evolution of the HC-induced VT variability. This parameter is independent of the stress time and stress bias voltage. The HC stress causes a significantly larger degradation in the subthreshold slope variability, compared to threshold voltage variability for both investigated technology nodes.
Sponsorship	IEEE Electron Devices Society
Starting Page	2347
Ending Page	2353
Page Count	7
File Size	474099
File Format	PDF
ISSN	00189383
Volume Number	58
Issue Number	8
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-08-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Stress Logic gates Semiconductor device modeling CMOS integrated circuits CMOS technology MOSFET circuits Transistors variability Hot carrier (HC) mismatch metal–oxide–semiconductor field-effect transistor (MOSFET) subthreshold slope threshold voltage
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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