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Deposition of diamond-like films by ecr microwave plasma
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 1995 |
| Description | Hard amorphous hydrogenated carbon, diamond-like films are deposited using an electron cyclotron resonance microwave plasma with a separate radio frequency power bias applied to a substrate stage. The electron cyclotron resonance microwave plasma yields low deposition pressure and creates ion species otherwise unavailable. A magnetic mirror configuration extracts special ion species from a plasma chamber. Different levels of the radio frequency power bias accelerate the ion species of the ECR plasma impinging on a substrate to form different diamond-like films. During the deposition process, a sample stage is maintained at an ambient temperature of less than 100.degree. C. No external heating is applied to the sample stage. The deposition process enables diamond-like films to be deposited on heat-sensitive substrates. |
| File Size | 738454 |
| Page Count | 11 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20080004771 |
| Archival Resource Key | ark:/13960/t58d4v18z |
| Language | English |
| Publisher Date | 1995-06-27 |
| Access Restriction | Open |
| Subject Keyword | Composite Materials Patents Diamond Films Microwaves Deposition Electron Cyclotron Resonance Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
