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Large area plasma source
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 2008 |
| Description | An all permanent magnet Electron Cyclotron Resonance, large diameter (e.g., 40 cm) plasma source suitable for ion/plasma processing or electric propulsion, is capable of producing uniform ion current densities at its exit plane at very low power (e.g., below 200 W), and is electrodeless to avoid sputtering or contamination issues. Microwave input power is efficiently coupled with an ionizing gas without using a dielectric microwave window and without developing a throat plasma by providing a ferromagnetic cylindrical chamber wall with a conical end narrowing to an axial entrance hole for microwaves supplied on-axis from an open-ended waveguide. Permanent magnet rings are attached inside the wall with alternating polarities against the wall. An entrance magnet ring surrounding the entrance hole has a ferromagnetic pole piece that extends into the chamber from the entrance hole to a continuing second face that extends radially across an inner pole of the entrance magnet ring. |
| File Size | 1923883 |
| Page Count | 18 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20090002654 |
| Archival Resource Key | ark:/13960/t3qv8h75j |
| Language | English |
| Publisher Date | 2008-07-15 |
| Access Restriction | Open |
| Subject Keyword | Plasma Physics Patents Plasma Propulsion Electron Cyclotron Resonance Waveguides Ion Currents Ferromagnetic Materials Polarity Permanent Magnets Current Density Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
