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Deposition of thin films of multicomponent materials
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 1993 |
| Description | Composite films of multicomponent materials, such as oxides and nitrides, e.g., lead zirconate titanate, are deposited by dc magnetron sputtering, employing a rotating substrate holder, which rotates relative to a plurality of targets, one target for each metal element of the multicomponent material. The sputtering is carried out in a reactive atmosphere. The substrates on which the layers are deposited are at ambient temperature. Following deposition of the composite film, the film is heated to a temperature sufficient to initiate a solid state reaction and form the final product, which is substantially single phase and substantially homogeneous. |
| File Size | 634212 |
| Page Count | 8 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20080004251 |
| Archival Resource Key | ark:/13960/t9z08235k |
| Language | English |
| Publisher Date | 1993-03-23 |
| Access Restriction | Open |
| Subject Keyword | Composite Materials Thin Films Patents Deposition Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |
