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Method of synthesizing metal doped diamond-like carbon films
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Copyright Year | 2003 |
| Description | A method of synthesizing metal doped carbon films by placing a substrate in a chamber with a selected amount of a metalorganic compound. An electron cyclotron resonance is applied to the chamber in order to vaporize the metalorganic compound. The resonance is applied to the chamber until a metal doped carbon film is formed. The metalorganic compound is preferably selected from the group consisting of an organic salt of ruthenium, palladium, gold or platinum. |
| File Size | 1047306 |
| Page Count | 19 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_20080007457 |
| Archival Resource Key | ark:/13960/t7mq00d79 |
| Language | English |
| Publisher Date | 2003-12-30 |
| Access Restriction | Open |
| Subject Keyword | Patents Coating Metal Films Diamond Films Organometallic Compounds Ntrs Nasa Technical Reports ServerĀ (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Patent |