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Bent crystal x-ray topography
| Content Provider | NASA Technical Reports Server (NTRS) |
|---|---|
| Author | Parker, D. L. |
| Copyright Year | 1978 |
| Description | A television X-ray topographic camera system was constructed. The system differs from the previous system in that it incorporates the X-ray TV imaging system and has a semi-automatic wafer loading system. Also the X-ray diffraction is in a vertical plane. This feature makes wafer loading easier and makes the system compatible with any commercial X-ray generating system. Topographs and results obtained from a study of the diffraction contrast variation with impurity concentration for both boron implanted and boron diffused silicon are included. |
| File Size | 4326306 |
| Page Count | 31 |
| File Format | |
| Alternate Webpage(s) | http://archive.org/details/NASA_NTRS_Archive_19810004431 |
| Archival Resource Key | ark:/13960/t4dn8z094 |
| Language | English |
| Publisher Date | 1978-08-01 |
| Access Restriction | Open |
| Subject Keyword | Urban Technology And Transportation Television Systems Nondestructive Tests Boron Semiconductors Materials Wafers Topography Imaging Techniques X Ray Imagery Process Control Industry Silicon X Ray Diffraction Ntrs Nasa Technical Reports Server (ntrs) Nasa Technical Reports Server Aerodynamics Aircraft Aerospace Engineering Aerospace Aeronautic Space Science |
| Content Type | Text |
| Resource Type | Technical Report |
