NDLI: Towards Measuring Young’s Modulus by Electronic Probing

Please wait, while we are loading the content...

ANES/ASME Joint National Solar Energy Week

ASME Citrus Engineering Symposium

ASME India Oil and Gas Pipeline Conference

ASME International Mechanical Engineering Congress and Exposition

ASME 2002 International Mechanical Engineering Congress and Exposition(IMECE2002)

ASME 2003 International Mechanical Engineering Congress and Exposition(IMECE2003)

ASME 2004 International Mechanical Engineering Congress and Exposition(IMECE2004)

ASME 2005 International Mechanical Engineering Congress and Exposition(IMECE2005)

ASME 2006 International Mechanical Engineering Congress and Exposition(IMECE2006)

ASME 2007 International Mechanical Engineering Congress and Exposition(IMECE2007)

ASME 2008 International Mechanical Engineering Congress and Exposition(IMECE2008)

ASME 2009 International Mechanical Engineering Congress and Exposition(IMECE2009)

ASME 2010 International Mechanical Engineering Congress and Exposition(IMECE2010)

ASME 2011 International Mechanical Engineering Congress and Exposition(IMECE2011)

ASME 2012 International Mechanical Engineering Congress and Exposition(IMECE2012)

Volume 5: Education and Globalization; General Topics

Volume 11: Transportation Systems

Volume 3: Design, Materials and Manufacturing, Parts A, B, and C

Volume 8: Mechanics of Solids, Structures and Fluids

Volume 6: Energy, Parts A and B

Volume 12: Vibration, Acoustics and Wave Propagation

Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B

Parametric Analysis of Effective Thermal Conductivity Models for Nanofluids

Characterize Dynamic Response of Cantilevers Submerged in Viscous Fluids

Model Development and Analysis of a Cricket Filiform Hair Socket Under Low Velocity Air Currents

The Friction Forces Between Si Tip and Multilayer Graphene

Investigation of the Measured Quality Factor Versus Polarization Voltage of a Multiple-Beam Tuning-Fork Gyroscope

Experimental Investigation and Finite Element Modeling Analysis of Photostrictive Optical Actuators

Mechanics of Buckled Structure MEMS for Actuation and Energy Harvesting Applications

Substrate Effect on Modulus of Elasticity and Hardness of Thin Film Under Nanoindentation Test

Methods for Mechanical Filtration and Automated Droplet Monitoring in Electrowetting on Dielectric Devices

High Sensitivity MEMS Biosensor for Monitoring Cell Attachment

Multifunctional Skin-Like Electronics for Long-Term Health Monitoring

Microfluidic Cell Co-Culture Platform With Liquid Fluorocarbon as the Cell Separator

An Urinary Biosensor for Early Stage Ovarian Cancer Detection: Experimental Characterization

Cultivating Photosynthetic Bacteria in a Planar-Stack Optofluidic Photobioreactor

Layered Hepatocytes and Endothelial Cells on a Transwell Membrane: Toward Engineering the Liver Sinusoid

Thermal Analysis of a Modular, Microfluidic Device for the Rapid Detection of Stroke

Solution-Based Fabrication of P-Channel and N-Channel Thin-Film Transistors Using Random and Aligned Carbon Nanotube Networks

Development of Transparent Conductive Single-Walled Carbon Nanotubes Films

Simulation of Hydrogen Diffusion and Adsorption on Single-Walled Carbon Nanotube

Low-Variance Monte Carlo Simulation of Thermal Transport in Graphene

Flexible Graphene Sensors Using Channel Circuit Electrodes for Explosive Detection

Molecular Simulation of the Self-Agglomeration of Carbon Nanostructures in Various Chemical Environments

Formulation for Static Behavior of the Viscoelastic Euler-Bernoulli Micro-Beam Based on the Modified Couple Stress Theory

Simulation of Biomanipulation Using Molecular Dynamics

The Effects of Ions and Surface Charge Density on Water Distribution in Silicon Nanochannel

Towards Electrostatic Force-Feedback for Reducing Thermally-Induced Vibrations of MEMS

Conducting Heterointerface of Polar-Nonpolar Band Gap Insulators

Extremely Large Deflection Actuators for Translation or Rotation

Out-of-Plane MEMS Actuation Using a Scanning Electron Microscope

DSMC Simulations of Squeeze Film Under a Harmonically Oscillating Micro RF Switch With Large Tip Displacements

Reinventing MEMS Through Genetic Programming

Towards Measuring Young’s Modulus by Electronic Probing

Towards a Self-Calibratable MEMS Absolute Temperature Sensor: A Theoretical Study

A Compact Cantilever Model That Includes Fillets

Modeling the Thermomechanical Interaction Between an Atomic Force Microscope Cantilever and Laser Light

Modeling a Three-Axis Thermal MEMS Gyroscope

GyroCube: A Novice-Friendly Design and Simulation Tool for Gyroscopic Analysis and Optimization of MEMS

Variation Analyses Using SugarCube

Fabrication and Characterization of a Metal-Based Micro-Heat Exchanger by Electrodeposition Technique

2-DOF Planar Motion Control System Using Model Reference Adaptive Control (MRAC) Algorithm

Numerical Modeling of Damping Characteristics in a Torsional Micro-Resonator

Process Design for the Flow of Ethanol Chemical Vapor Deposition Grown Vertically Aligned Single Walled Carbon Nanotubes

A Multiphysics Reduced Order Model of Valve Pumping in a 4-Stage Vacuum Micropump

Design of DNA Origami Machines and Mechanisms

Towards the Realization of a Conveyor Platform for Microparts Employing a Deformable Surface

Sensitivity Analysis of Micropart Motion on a Controlled Deformable Continuous Surface

Towards a Self-Calibratable IMU

Cavity Filling Analysis for the Fabrication of an Alignment Structure in Micro Hot Embossing

Electric Field Gradients in Micro/Nanofluidic Devices

Static Pull-In Analysis of Micro-Cantilevers in Wet Etching Fabrication Process

Nonlinear Analysis of Pull-In Phenomenon and Maximum Deflection of MEMS With Movable Base Under Capillary and Van Der Waals Forces

Design Principles of the Thermal MEMS Gyroscope

Encapsulating Protective Layers for Enhancing Survivability of Circuit Board Assemblies in Harsh and Extreme Environments

Enhanced Mechanical Properties of Poly(Vinyl Alcohol) Nanofibers With Molecular Level Dispersed Graphene

A Microfluidic Platform for Evaluating Anode Substrates for Microbial Fuel Cells

MEMS Demodulator

A Parallel Coupled Ordinates Method for Rarefied Gas Dynamics Simulations

Silicon Interposer Featuring Novel Electrical and Optical TSVs

Influence of Bonding Pressure on the Mechanical Properties of Copper Bumps

Effect of Deposition Temperature on I-V Characteristics of Vanadium Oxide Film

Precision Gravure Printing of Conductive Ink on Flexible Substrate for Printed Electronics

Investigation of Alternative Materials to Si for Solid State Micro Joints

Finite Element Analysis of Weld Area in Spot Bonding Process to Predict Bond Strength in Transparent Materials Using Ultrafast Lasers

Power Die Packaging by Substrate Embedding

Bond Strength Models for Adhesively Bonded Flip-Chip Interconnects

Design and Process Development Concerns for the Assembly of Very Small Solder Joints

Controlling the Superior Reliability of Lead Free Assemblies With Short Standoff Height Through Design and Materials Selection

Evaluation of a Novel Anisotropic Conductive Adhesive Shear Under Multiple Tin-Lead and Lead-Free Reflow Cycles for Package-on-Package (POP) Assembly

Creep Strain Measurement of an Actual Leadfree Solder Interconnect Using Digital Image Correlation

Mechanical Behavior of Sn1Ag0.5Cu and Sn3Ag0.5Cu Alloys at High Strain Rates

Surface Treatment of Polymers for the Fabrication of All-Polymer Microfluidic Devices

Modeling and Optimization of an In-Plane Rotary Microactuator With Thermal Unimorph

A Micromachined Contactless Suspension With Zero Spring Constant

Wavelet Based Nano-Texture Structures for Thin Film PV Cells

Fabrication of Perforated Conical Nanopores in Freestanding Polymer Membranes Using Nanoimprint Lithography and Pressed Self-Perfection Method

A Polymer-Based Microfluidic Resistive Sensor for Detecting Distributed Loads

Novel Fabrication and Characterization of Diaphragm Micromirror Using ‘Bulk Lithography’

Dendritic Nanotip for Low-Cost Detection of Mycobacterium Tuberculosis

Micro-Fluidic Assisted Passive Direct Methanol Fuel Cells

Large Deflection 3DOF Piezoelectric Microrobotic Manipulator With Positional Sensing and Self-Calibration

Influence of Fringing Field Effect on the Pull-In of Size Dependent Micro-Beams

Characterization of Static Behavior of Electrostatically Actuated Micro Tweezers Using Modified Couple Stress Theory

Spurious Signals in the Thermal MEMS Gyroscope

A Flexoelectric Micro-Accelerometer

Analysis of Band Structures of Nanosized Phononic Crystals by Nonlocal Elastic Theory

Measurement of In-Plane Thermal Conductivity Using Suspended SiNx Islands

Nanoparticle Transport Through Boundaries of Nanoporous Structures

Intelligent Combination of Batch Fabrication With Rapid Prototyping Techniques for a Drop-on-Demand Microdrop Generator

Opto-Mechanical Actuation of Carbon Nanotube/Polymer Composite Membranes for Microfluidic Pumping Applications

Droplet Evaporation and Chemical Reaction in a Single Multi-Component Droplet to Synthesis Mixed-Oxide Film Using Spray Pyrolysis Method

Effects of Biased AC Electroosmotic Micro-Pumping on Symmetric and Asymmetric Electrode Arrays

Simulations of Droplet Collisions in Shear Flow

Microbubble Array as a Versatile Tool for On-Chip Worm Processing

Design of a Microfluidic Device to Induce Noise Damage in Hair Cells of the Zebrafish Lateral Line

Sculpting and Aerosolizing Pinned Liquid Films With Localized Acoustic Pressures of Surface Acoustic Waves

Investigations on Transient Natural Convection in Boron Nitride-Mineral Oil Nanofluid Systems

Electrothermal Pumping With Thin Film Resistive Heaters

Microfluidic Characterization of Steam-Bitumen Interactions During Steam Assisted Gravity Drainage Operations

Electrothermal Blinking Vortices for Chaotic Mixing

Effects of the Light Source on the Signal Quality for Photonic and Microfluidic Nanohole Sensor Calorimeter

Non-Invasive Sorting of Lipid Producing Microalgae With Dielectrophoresis Using Microelectrodes

Design and Fabrication of Rock-Based Micromodel

Development Drug Delivery Systems by Shock Waves Using Special Microcapsules Including a Gas Bubble

Electrostatically Actuated Compliant Microvalve

Micro-Scale Part Manipulation on a Liquid Interface Through Interface Curvature Effects

Numerical Simulation of Laminar Forced Convection Heat Transfer of Two Square Prisms Inside Nanofluids

Failure Mechanism and Reliability Design Study of Bendable Electronic Module

A Study on the Mechanical Stability of a-IGZO Based Inverter

Anisotropic Strain-Field-Induced Change of the Electronic Conductivity of Graphene Sheets and Carbon Nanotubes

Modeling of Micro Electron Beam Welding With Melting and Evaporation

Cohesive Fracture Mechanics Based Finite Element Analysis to the Performance of Lead Free Solders in BGA Packaging Under Drop Impact

Multi-Scale Transient Thermal Analysis of Microelectronics

Cost Assessment for Implementation of Embedded Prognostic Health Management for Electronic Systems

Thermal Transport in 3D Pillared CNT-Graphene Nanostructures

Sensitivity of Thermal Conductivity of Carbon Nanotubes to Defect Concentrations and Heat-Treatment

Investigation of Molten Salt Nanomaterial as Thermal Energy Storage in Concentrated Solar Power

Effect of Staggered Configurations on Laminar Forced Convection Heat Transfer From Square Cylinders Inside Water/CuO Nanofluid

Nanoscale Characterization of Wear Particles Produced From CNF-Reinforced HDPE Composites

Integrity Study of ACSR and ACSS Two Stage Splice Connectors at High Operation Temperatures

Study of Lattice Strain Propagation in Molecular Beam Epitaxy of Nano Scale Magnesium Oxide Thin Film on 6H-SiC Substrates Using Neural Network Computer Models

Stable Island-Like Water Films Adsorbed on Mica Surface

Optical Properties of Nano-Structure Tungsten-Doped Vanadium Oxide

Analysis of Plastic Deformation in Metal-Ceramic Nanolayers During Cyclic Indentation

Dynamic Response of a Steel-Concrete Hybrid Frame to Support 15MW Compressor

Micro-Electro-Mechanical Systems (MEMS) Micro-Heater

A High Temperature Pressure Sensor Based on Advanced Thick Film Technology

Optimal Design of Axe-Symmetric Diffuser via Genetic Algorithm and Ball-Spine Inverse Design Method

Estimating the Position and Size of a Cavity in a Plate by Means of Boundary Element Method and Conduction Heat Transfer

Compact Modeling of 3D Stacked Die Inter-Tier Microfluidic Cooling Under Non-Uniform Heat Flux

New Fabrication Method for High-Q MEMS Inductors

Numerical Analysis of Deposits and Corrosion Influence on a Centrifugal Compressor Performance

High Performance MEMS Thermal Gyroscope

A Study on the Dynamic Response in Standardized Drop Test

Investigation of a MEMS-Based Boiler and Free Piston Expander for Energy Harvesting

Scavenging Wind Energy From Fluttering Membranes With Piezoelectric Materials

Thermoelectric Generators Embedded in Microelectronic Chip

Micro-Power Generators Employing Commercially Available Piezoelectric Materials

Nonlinear Control Modeling for Arrays of Coupled Mechatronic Transducers

Printed Circuit Board Pad Crater Test Methods and Sample Design

Micro-Texture Dependence of the Strength of Fine Metallic Bumps Used for Electronic Packaging

Analysis of TSV/Micro-Bump Deformation due to Chip Misalignment and Thermal Processing in 3D IC Packages

Inverse Derivation of Constants for the Constitutive Equation and Fatigue Model of Pb-Free Solder Joints Based on Experiment Results, Finite Element Simulation and Virtual Optimization Methodology

Effect of Manufacturing Process Parameters on Property Evolution of Printed Circuit Board Laminates

Economically Viable Fabrication Method of Nanocomposite Materials From Linear Arrays of Metallic Nanoparticles and Nanorods on Tubular Halloysite Templates

An Automated Stage for Scalable Imprinting of DNA Nanowires Based on a Self-Aligning Technique

Length Scale Dependent Deformation in Polymers

Rack Level Modeling of Air Flow Through Perforated Tile in a Data Center

Investigation of Liquid Flow in a Multi-Pass Branching Microchannel System

Effect of Phonon Confinement on the Dispersion Relation and Heat Capacity in Nanoscale Si Membranes

A Study of Thermal Effectiveness of Laminar Forced Convection of Nanofluids

Measurement of Thermal Conductivity and Interface Thermal Resistance of Multilayered Thin-Films Using Variable Pulse-Width Transient Thermoreflectance

Performance of a Thermoelectric Adsorption Heat Pump Vis-à-Vis Thermoelectric Device and Adsorption Heat Pump for Electronics Cooling Applications

System-Level Design for Liquid Cooled Chiller-Less Data Center

Optimization Under Uncertainty of Manifold Microchannel Heat Sinks

Chemically B-N Modified Activated Carbon and its Thermal Stability and Desorption Enthalpy With Methanol

Thermal Conductivity Performance Modeling and Characterization of a Novel Anisotropic Conductive Adhesive Used in Lead-Free Electronics Packaging

Transient Analysis for Contained-Cold-Aisle Data Center

Modeling the Hotspot Temperature in AlGaN/GaN High Electron Mobility Transistors Using a Non-Gray Phonon BTE Solver

Removing the Hot-Spots in High Power Devices Using the Thermoelectric Cooler and Micro Heat Pipe

Volume 2: Biomedical and Biotechnology

Volume 1: Advances in Aerospace Technology

ASME 2013 International Mechanical Engineering Congress and Exposition(IMECE2013)

ASME 2014 International Mechanical Engineering Congress and Exposition(IMECE2014)

ASME 2015 International Mechanical Engineering Congress and Exposition(IMECE2015)

ASME 2016 International Mechanical Engineering Congress and Exposition(IMECE2016)

ASME 2017 International Mechanical Engineering Congress and Exposition(IMECE2017)

ASME 2018 International Mechanical Engineering Congress and Exposition(IMECE2018)

ASME International Pipeline Geotechnical Conference

ASME Power Conference

ASME Turbine Blade Tip Symposium

ASME/IEEE Joint Rail Conference

ASME/JSME Thermal Engineering Joint Conference

ASME/NRC Pump and Valve Symposium

ASME/USCG Workshop on Marine Technology and Standards

CANEUS: MNT for Aerospace Applications

Dynamic Systems and Control Conference

Energy Nanotechnology International Conference

Energy Sustainability

Engineering Systems Design and Analysis

Engineering Technology Conference on Energy

Fluid Power Systems Technology

Fluids Engineering Division Summer Meeting

Frontiers in Biomedical Devices

Gas Turbine India Conference

Global Congress on NanoEngineering for Medicine and Biology

Heat Transfer Summer Conference

High Temperature Reactor Technology

Information Storage and Processing Systems

Integrated Nanosystems: Design, Synthesis, and Applications

Internal Combustion Engine Division Fall Technical Conference

Internal Combustion Engine Division Spring Technical Conference

International Conference on Fluidized Bed Combustion

International Conference on Fuel Cell Science, Engineering and Technology

International Conference on Integration and Commercialization of Micro and Nanosystems

International Conference on Micro/Nanoscale Heat Transfer

International Conference on Nanochannels, Microchannels, and Minichannels

International Conference on Nuclear Engineering

International Conference on Offshore Mechanics and Arctic Engineering

International Conference on Radioactive Waste Management and Environmental Remediation

International Design Engineering Technical Conferences and Computers and Information in Engineering Conference

International Electronic Packaging Technical Conference and Exhibition

International Heat Transfer Conference

International Joint Power Generation Conference

International Joint Tribology Conference

International Manufacturing Science and Engineering Conference

International Pipeline Conference

International Solar Energy Conference

International Symposium on Flexible Automation

Multifunctional Nanocomposites and Nanomaterials International Conference

Noise Control and Acoustics Division Conference

North American Waste-to-Energy Conference

Pressure Technology

Pressure Vessels and Piping Conference

Rail Transportation Division Conference

Small Modular Reactors Symposium

Smart Materials, Adaptive Structures and Intelligent Systems

Summer Bioengineering Conference

Turbo Expo: Power for Land, Sea, and Air

Verification and Validation

Water Quality, Drought, Human Health and Engineering Conference

Wind Energy Symposium

World Conference on Innovative Virtual Reality

World Tribology Congress

Towards Measuring Young’s Modulus by Electronic Probing

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Chigullapalli, Aarti Jason, V. Clark
Copyright Year	2012
Abstract	We propose an accurate and precise method for measuring the Young’s modulus of MEMS with comb drives by electronic probing of capacitance. The electronic measurement can be performed off-chip for quality control or on-chip after packaging for self-calibration. Young’s modulus is an important material property that affects the static or dynamic performance of MEMS. Electrically-probed measurements of Young’s modulus may also be useful for industrial scale automation. Conventional methods for measuring Young’s modulus include analyzing stress-strain curves, which is typically destructive, or include analyzing a large array of test structures of varying dimensions, which requires a large amount of chip real estate. Our method measures Young’s modulus by uniquely eliminating unknowns and extracting the fabricated geometry, displacement, comb drive force, and stiffness. Since Young’s modulus is related to geometry and stiffness that we find using electronic measurands, we are able to express Young’s modulus as a function of electronic measurands. We verify our method by using it to predict the Young’s modulus of a computer model. We treat the computer model as we would treat a true experiment by depending only on its electronic measurands. We find good agreement in predicting the exactly known Young’s modulus in a computer model within 0.1%.
Starting Page	203
Ending Page	211
Page Count	9
File Format	PDF
ISBN	9780791845257
DOI	10.1115/IMECE2012-89155
Volume Number	Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B
Conference Proceedings	ASME 2012 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2012-11-09
Publisher Place	Houston, Texas, USA
Access Restriction	Subscribed
Subject Keyword	Computers Microelectromechanical systems Stress-strain curves Dimensions Calibration Displacement Geometry Young's modulus Materials properties Quality control Packaging Capacitance Electronic measurement Stiffness
Content Type	Text
Resource Type	Article

Central Library (ISO-9001:2015 Certified)
Indian Institute of Technology Kharagpur
Kharagpur, West Bengal, India | PIN - 721302

See location in the Map
03222 282435
Mail: support@ndl.gov.in

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in