NDLI: Measurement of In-Plane Thermal Conductivity Using Suspended SiNx Islands

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Alaie, Seyedhamidreza Drew, F. Goettler Abbas, Khawar El-Kady, Ihab Zayd, C. Leseman
Copyright Year	2012
Abstract	In order to measure in-plane thermal conductivity, electrical resistivity, and Seebeck Coefficient of Phononic Crystals (PnCs) a micro device is designed and fabricated to host different nano-scale samples. The device is comprised of two SiNx suspended membranes with patterned by Pt on top and covered by AlN. The Pt deposited on these two membranes or islands are dual-purpose temperature sensors and heaters. One side of a sample can be attached to each of the two islands. In this way 1-D heat flow can be established in the material to be tested. Covering the islands with AlN enhances the uniformity of temperature on each sensor. Moreover, AlN is an excellent electrical insulator, and it protects the platinum sensors from different sources of doping such as gallium ions used for patterning, depositing, mounting, or demounting different samples on the islands. This ensures the thermo-electric properties of the sensors on the platform do not change after each measurement. Using this design, it is demonstrated that one platform can be used for measurement of a silicon slab and then a separate measurement of a 1-D PnC fabricated from the same sample. The 1-D PnC had a Si-W structure that was fabricated using a Focused Ion Beam (FIB) and a Gas Injection System (GIS) capable of depositing W.
Starting Page	611
Ending Page	615
Page Count	5
File Format	PDF
ISBN	9780791845257
DOI	10.1115/IMECE2012-88786
Volume Number	Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B
Conference Proceedings	ASME 2012 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2012-11-09
Publisher Place	Houston, Texas, USA
Access Restriction	Subscribed
Subject Keyword	Phononic crystals Temperature uniformity Membranes Gallium Nanoscale phenomena Ions Flow (dynamics) Design Temperature sensors Heat Focused ion beams Electrical resistivity Platinum Thermal conductivity Silicon Sensors Slabs
Content Type	Text
Resource Type	Article

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