NDLI: Modeling and Optimization of an In-Plane Rotary Microactuator With Thermal Unimorph

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Yang, Fan Lei, Nan Chen, Xiaolin Yang, Jiaping
Copyright Year	2012
Abstract	In this paper, design modeling of an in-plane rotary microactuator with electro-thermal unimorph is conducted. The electro-thermal unimorph is made of confined polymers consisting of a silicon skeleton filled with SU-8 photoresist. Due to the effect of thermal expansion mismatch between silicon and SU-8, the composite unimorph bends laterally when thermally activated. Numerical studies are carried out to investigate the effects of the silicon/SU-8 composite microstructure on the unimorph deflection. Unimorph dimensions are optimized to generate a large displacement at the cantilever tip. The microactuator device is comprised of four identical unimorphs and a suspended central platform. When thermally actuated, the displaced unimorphs can rotate the central platform bi-directionally in the platform plane. Finite element models of the microactuator device are built to investigate the device performance. A new device layout with a detached central platform structure is proposed to increase the rotational angle while maintaining a reasonable operating temperature. Our results show that the optimized microactuator can achieve a rotational angle of 4 degrees under a small actuating voltage input of 1V.
Starting Page	513
Ending Page	518
Page Count	6
File Format	PDF
ISBN	9780791845257
DOI	10.1115/IMECE2012-86418
Volume Number	Volume 9: Micro- and Nano-Systems Engineering and Packaging, Parts A and B
Conference Proceedings	ASME 2012 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2012-11-09
Publisher Place	Houston, Texas, USA
Access Restriction	Subscribed
Subject Keyword	Deflection Microactuators Dimensions Modeling Optimization Displacement Cantilevers Design Thermal expansion Finite element model Composite materials Photoresists Silicon Polymers Operating temperature
Content Type	Text
Resource Type	Article

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