NDLI: Comparison of Tooling Materials in Injection Molding of Microscale Features

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Yoon, Sung-Hwan Palanisamy, Prabhu Padmanabha, Purushotham Joey, L. Mead Carol, M. F. Barry
Copyright Year	2009
Abstract	Although high aspect ratio micro and nanoscale polymer features have been replicated in a range of polymers using injection molding, researchers have also used tooling inserts with a range of sizes, aspect ratios, and tooling materials. In this work, microscale features with molded in polymethylmethacrylates using three types of tooling with similar features. The tooling materials included silicon wafers with an antistiction coating, gold-coated nickel inserts, and a metal-polymer hybrid tooling. Tooling was evaluated based on the ease of melt filling and part ejection; the replication quality as characterized using optical profilometry, confocal microscopy, and scanning electron microscopy; and the damage to the tooling after repeated use. With lower aspect ratio features, the tooling type did not significantly affect replication, but for higher aspect ratio features the hybrid tooling provided far better replication than the silicon tooling. This difference was attributed to retardation of heat transfer in the features of the hybrid tooling. All three tooling materials exhibited polymer-free surfaces after injection molding.
Starting Page	545
Ending Page	552
Page Count	8
File Format	PDF
ISBN	9780791843857
DOI	10.1115/IMECE2009-13346
e-ISBN	9780791838631
Volume Number	Volume 12: Micro and Nano Systems, Parts A and B
Conference Proceedings	ASME 2009 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2009-11-13
Publisher Place	Lake Buena Vista, Florida, USA
Access Restriction	Subscribed
Subject Keyword	Scanning electron microscopy Microscale devices Metals Nanoscale phenomena Semiconductor wafers Coatings Tooling Microscopy Injection molding Nickel Silicon Coating processes Polymers Damage Heat transfer
Content Type	Text
Resource Type	Article

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