NDLI: 3-D Integration of Micro-Gratings Into Bio-Analytical Devices

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Farshchian, Bahador Ok, Jeong Tae Lee, Jaejong Park, Sunggook
Copyright Year	2009
Abstract	The ability to produce three-dimensional micro- and nanoscale features at low cost is desirable for many applications such as microfluidic devices, micro and nanomechanical systems, photonic crystals and diffractive optics. For example, micro and nanostructures patterned on the sidewalls of microfluidic devices allow better control over the wetting behavior of fluids flowing through the microchannel. In this study we report on a simple and effective process that allows direct integration of microstructures into a microfluidic device via a modified molding process. The key for the process is to use a thin poly(dimethylsiloxane) layer having microgratings as an intermediate stamp which was placed between a brass mold insert with microfluidic features and a PMMA sheet, which was followed by hot embossing. Using this method, we have demonstrated the formation of micropatterns on non-planar surfaces and at the sidewalls of microfluidic devices, as confirmed using scanning electron microscopy. The designed process will fill the gap in current micro- and nanofabrication technologies in that most of the technologies allow for patterning only on planar substrates.
Starting Page	481
Ending Page	485
Page Count	5
File Format	PDF
ISBN	9780791843857
DOI	10.1115/IMECE2009-11934
e-ISBN	9780791838631
Volume Number	Volume 12: Micro and Nano Systems, Parts A and B
Conference Proceedings	ASME 2009 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2009-11-13
Publisher Place	Lake Buena Vista, Florida, USA
Access Restriction	Subscribed
Subject Keyword	Scanning electron microscopy Molding Embossing Wetting Crystals Nanoscale phenomena Diffraction gratings Optics Nanostructures Microchannels Brass (metal) Fluids Nanofabrication Microfluidics
Content Type	Text
Resource Type	Article

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