NDLI: Design Optimization for Non-Resonant MEMS Gyroscope

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Cui, Wei Chen, Xiaolin Xue, Wei
Copyright Year	2009
Abstract	Conventional capacitive MEMS gyroscopes require close matching between the resonant frequencies of drive mode and sense mode. However, the uncertainties in the microfabrication process impair the robustness of the gyroscopes and often lead to unpredictable device performance. This paper analyzes a 4 degree-of-freedom (DOF) non-resonant gyroscope which is less vulnerable to the fabrication perturbations. Unlike the conventional resonant gyroscope which has only one resonant frequency for drive and sense modes, the 4-DOF gyroscope includes two resonant frequencies for each mode. The non-resonant gyroscope design aims to reduce resonance frequency matching, namely to minimize the effect of the inevitable fabrication uncertainties as well as to increase the bandwidth with less sacrifice to the sensitivity. The device performance is analyzed and optimized by the behavior model approach in CoventorWare which significantly accelerates the simulation compared to the traditional finite element method. The optimized non-resonant gyroscope with higher fabrication tolerance as well as enhanced device performance is proven to be an effective design and can be used in a wide range of applications.
Starting Page	427
Ending Page	432
Page Count	6
File Format	PDF
ISBN	9780791843857
DOI	10.1115/IMECE2009-10812
e-ISBN	9780791838631
Volume Number	Volume 12: Micro and Nano Systems, Parts A and B
Conference Proceedings	ASME 2009 International Mechanical Engineering Congress and Exposition
Language	English
Publisher Date	2009-11-13
Publisher Place	Lake Buena Vista, Florida, USA
Access Restriction	Subscribed
Subject Keyword	Mems gyroscope Design optimization Behavior model approach Design Microelectromechanical systems Resonance Optimization
Content Type	Text
Resource Type	Article

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