NDLI: Mass Flow Rate Measurement Through Rectangular Microchannels for Large Knudsen Number Range

Content Provider	The American Society of Mechanical Engineers (ASME) Digital Collection
Author	Nacer, M. Hadj Perrier, Pierre Graur, Irina
Copyright Year	2011
Abstract	The mass flow rate through microchannels with rectangular cross section is measured for the wide Knudsen number range (0.0025–26.2) in isothermal steady conditions. The experimental technique called ‘Constant Volume Method’ is used for the measurements. This method consists of measuring the small pressure variations in the tanks upstream and downstream of the microchannel. The measurements of the mass flow rate are carried out for three gases (Helium, Nitrogen and Argon). The microchannel internal surfaces are covered with a thin layer of gold with mean roughness Ra = 0.87nm (RMS). The continuum approach (Navier-Stokes equations) with first order velocity slip boundary condition was used in the slip regime (Knudsen number varies from 0.0025 to 0.1) to obtain the experimental velocity slip and accommodation coefficients associated to the Maxwell kinetic boundary condition. In the transitional and near free molecular regimes the linearized kinetic BGK model was used to calculate numerically the mass flow rate. From the comparison of the numerical and measured values of the mass flow rate the accommodation coefficient was also deduced.
Sponsorship	Heat Transfer Division
Starting Page	369
Ending Page	375
Page Count	7
File Format	PDF
ISBN	9780791844632
DOI	10.1115/ICNMM2011-58167
Volume Number	ASME 2011 9th International Conference on Nanochannels, Microchannels, and Minichannels, Volume 1
Conference Proceedings	ASME 2011 9th International Conference on Nanochannels, Microchannels, and Minichannels
Language	English
Publisher Date	2011-06-19
Publisher Place	Edmonton, Alberta, Canada
Access Restriction	Subscribed
Subject Keyword	Accommodation coefficients Gas flows Mass flow rate Pressure measurements Flow (dynamics) Knudsen number Microchannels
Content Type	Text
Resource Type	Article

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