NDLI: Nanomanufacturing Strategy for Aligned Assembly of Nanowire Arrays

Content Provider	Springer Nature Link
Author	Shin, Kyeong Sik Chui, Chi On
Copyright Year	2012
Abstract	The work reported here concerns a proposed nanomanufacturing strategy to assemble aligned quasi-one-dimensional nanostructure arrays with intrinsic and concurrent control over the resultant number, pitch, and linewidth. For the first time, a standard lithography and crystallographic etching approach have been combined to synthesize periodic, sublithographic, and line edge roughness (LER)-free surface arrays for selective conjugation of nanowires. Key experimental modules have been developed, including the formation of LER-free substrate arrays, formation of periodically dissimilar surfaces, selective conjugation of nanowires, and stamping transfer of nanowire arrays. In particular, successful assembly of Si nanowires onto periodic Si/SiO$_{ x }$ surfaces and subsequent transfer of the resultant aligned Si nanowire arrays onto a different substrate surface have been repeatedly demonstrated. The dependences and probability of nanowire aligned assembly have also been examined. The proposed strategy is based on a wafer-scale and very large-scale integration (VLSI)-compatible philosophy, and alignment to pre-existing features on the target substrate is also inherently allowed as a side benefit. Besides, LER-free features could be created, which arguably enables extreme linewidth scaling with suppressed variations.
Starting Page	935
Ending Page	943
Page Count	9
File Format	PDF
ISSN	03615235
Journal	Journal of Electronic Materials
Volume Number	41
Issue Number	5
e-ISSN	1543186X
Language	English
Publisher	Springer US
Publisher Date	2012-03-28
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Alignment assembly crystallographic etching line edge roughness nanostructure array nanowire Solid State Physics Characterization and Evaluation of Materials Optical and Electronic Materials Electronics and Microelectronics, Instrumentation
Content Type	Text
Resource Type	Article
Subject	Materials Chemistry Electronic, Optical and Magnetic Materials Condensed Matter Physics Electrical and Electronic Engineering

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