NDLI: Rietveld analysis of CaCu$_{3}$Ti$_{4}$O$_{12}$ thin films obtained by RF-sputtering

Content Provider	Springer Nature Link
Author	Foschini, C. R. Tararam, R. Simões, A. Z. Rocha, L. S. Santos, C. O. P. Longo, E. Varela, J. A.
Copyright Year	2015
Abstract	Calcium copper titanate, CaCu$_{3}$Ti$_{4}$O$_{12}$, CCTO, thin films with polycrystalline nature have been deposited by RF sputtering on Pt/Ti/SiO$_{2}$/Si (100) substrates at a room temperature followed by annealing at 600 °C for 2 h in a conventional furnace. The crystalline structure and the surface morphology of the films were markedly affected by the growth conditions. Rietveld analysis reveal a CCTO film with 100 % pure perovskite belonging to a space group Im3 and pseudo-cubic structure. The XPS spectroscopy reveal that the in a reducing N$_{2}$ atmosphere a lower Cu/Ca and Ti/Ca ratio were detected, while the O$_{2}$ treatment led to an excess of Cu, due to Cu segregation of the surface forming copper oxide crystals. The film present frequency -independent dielectric properties in the temperature range evaluated, which is similar to those properties obtained in single-crystal or epitaxial thin films. The room temperature dielectric constant of the 600-nm-thick CCTO films annealed at 600 °C at 1 kHz was found to be 70. The leakage current of the MFS capacitor structure was governed by the Schottky barrier conduction mechanism and the leakage current density was lower than 10$^{−7}$ A/cm$^{2}$ at a 1.0 V. The current–voltage measurements on MFS capacitors established good switching characteristics.
Starting Page	2175
Ending Page	2182
Page Count	8
File Format	PDF
ISSN	09574522
Journal	Journal of Materials Science: Materials in Electronics
Volume Number	27
Issue Number	3
e-ISSN	1573482X
Language	English
Publisher	Springer US
Publisher Date	2015-11-25
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Optical and Electronic Materials Characterization and Evaluation of Materials
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Biomaterials Biophysics Condensed Matter Physics Electronic, Optical and Magnetic Materials Bioengineering Electrical and Electronic Engineering Biomedical Engineering

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