NDLI: Design and modelling of a micro resonant pressure sensor

Content Provider	Springer Nature Link
Author	Sujan, Y. Uma, G. Umapathy, M.
Copyright Year	2016
Abstract	A silicon island compliant mechanism supported frequency tunable resonating beam based micro pressure sensor is proposed in this work. The sensor consists of a silicon frame with silicon islands supporting a silicon nitride resonating beam placed diagonally on the island in a square diaphragm made of silicon. The analytical model of the sensor is developed by modelling the diaphragm having islands as non uniform sections and the resonating beam under axial tensile load. The sensor is numerically modelled and its dimensions are optimized using MEMS CAD Tool COVENTORWARE. The performance of the proposed sensor is evaluated through simulation for a pressure range of 0–20 bar. The results demonstrate that the sensor is linear and its characteristics obtained from the analytical and numerical model are in close agreement. The sensitivity of the sensor is compared with the sensitivity of a sensor having islands and the resonating beam placed between two opposite sides of the diaphragm and found to have 5 % increment in sensitivity.
Starting Page	1285
Ending Page	1293
Page Count	9
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	23
Issue Number	5
e-ISSN	14321858
Language	English
Publisher	Springer Berlin Heidelberg
Publisher Date	2016-02-08
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electronics and Microelectronics, Instrumentation Nanotechnology Mechanical Engineering
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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