NDLI: CMOS Integrated Organic Ciliary Actuator Arrays For General-Purpose Micromanipulation Tasks

Content Provider	Semantic Scholar
Author	Suh, John W. Darling, R. Bruce Böhringer, Karl F. Donald, Bruce Randall Baltes, Henry Kovacs, Gregory T. A.
Copyright Year	2000
Abstract	The first micromachined bimorph organic ciliary array with on-chip CMOS circuitry is presented. This device is composed of an 8 × 8 array of cells each having four orthogonally oriented actuators in an overall die size of 9.4mm × 9.4mm. The polyimide based actuators were fabricated directly above the selection and drive circuitry. Selection and activation of actuators in this array shows that integration was successful.
Starting Page	191
Ending Page	215
Page Count	25
File Format	PDF HTM / HTML
DOI	10.1007/978-1-4615-4545-3_10
Alternate Webpage(s)	https://www.cs.duke.edu/~brd/papers/src-papers/www-cmos-mems.pdf
Alternate Webpage(s)	https://users.cs.duke.edu/~brd/papers/src-papers/www-cmos-mems.pdf
Alternate Webpage(s)	http://www.ee.washington.edu/faculty/karl/Publications/PS/sdbdbk99.ps.gz
Alternate Webpage(s)	http://www.cs.dartmouth.edu/~brd/papers/www-cmos-mems.pdf
Alternate Webpage(s)	http://www.ee.washington.edu/research/mems/publications/2000/chapters/distributedmanipulation-suh-00.pdf
Alternate Webpage(s)	https://www2.ee.washington.edu/research/mems/publications/2000/chapters/distributedmanipulation-suh-00.pdf
Alternate Webpage(s)	http://www.cs.duke.edu/~brd/papers/src-papers/www-cmos-mems.pdf
Alternate Webpage(s)	https://www.cs.duke.edu/brd/papers/src-papers/www-cmos-mems.pdf
Alternate Webpage(s)	http://www.ee.washington.edu/faculty/karl/Publications/sdbdbk99.pdf
Alternate Webpage(s)	http://www.cs.duke.edu/brd/papers/src-papers/www-cmos-mems.pdf
Alternate Webpage(s)	https://doi.org/10.1007/978-1-4615-4545-3_10
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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