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CMOS Integrated Organic Ciliary Actuator Array as a General-Purpose Micromanipulation Tool for Small Objects (1999)
| Content Provider | CiteSeerX |
|---|---|
| Author | Suh, John W. Darling, R. Bruce Böhringer, Karl F. Donald, Bruce R. Baltes, Henry Kovacs, Gregory T. A. |
| Abstract | The first micromachined bimorph organic ciliary array with on-chip CMOS circuitry is presented. This ciliary array is composed of an 8 x 8 array of cells each having four orthogonally oriented actuators in an overall die size of 9.4 x 9.4mm². The polyimide based actuators were fabricated directly above the selection and drive circuitry. Selection and activation of actuators in this array shows that integration was successful. The array was programmed to do several kinds of vector field operations, including linear translation, diagonal motion, squeeze field manipulations, and centering operations. Preliminary experiments were also performed with the first implementation of a "universal field" that uniquely positions and orients any non-symmetric part without programming or sensor feedback. All tasks were demonstrated using thin silicon dice of about 3 x 3 x 0.5mm³ size as the object being moved. |
| File Format | |
| Volume Number | 8 |
| Journal | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS |
| Language | English |
| Publisher Date | 1999-01-01 |
| Access Restriction | Open |
| Subject Keyword | Small Object General-purpose Micromanipulation Tool Sensor Feedback Thin Silicon Dice Uniquely Position Overall Die Size Bimorph Organic Ciliary Array Vector Field Operation On-chip Cmos Circuitry Squeeze Field Manipulation Ciliary Array First Implementation Several Kind Universal Field Non-symmetric Part Diagonal Motion Preliminary Experiment Linear Translation Drive Circuitry |
| Content Type | Text |
| Resource Type | Article |
