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Fully Programmable MEMS Ciliary Actuator Arrays for Micromanipulation Tasks (2000)
| Content Provider | CiteSeerX |
|---|---|
| Author | Suh, J. W. Darling, R. B. Böhringer, K. -F. Donald, B. R. Baltes, H. Kovacs, G. T. |
| Description | The first micromachined bimorph organic ciliary array with on-chip CMOS circuitry is presented. This device is composed of an 8 x 8 array of cells each having four orthogonally oriented actuators in an overall die size of 9.4mm x 9.4mm. The polyimide based actuators were fabricated directly above the selection and drive circuitry. Selection and activation of actuators in this array shows that integration was successful. The integration of CMOS electronics and MEMS micromechanisms allows the implementation of new tasklevel micromanipulation strategies. New low-level control algorithms (actuator gaits) were also demonstrated. The array was programmed to perform several kinds of manipulation tasks, including linear translation, diagonal motion, as well as vector field operations such as squeeze field and radial field orienting and centering. Preliminary experiments were also performed with the first implementation of a "universal field" that uniquely positions and orients any non-symmetric part without |
| File Format | |
| Language | English |
| Publisher Date | 2000-01-01 |
| Publisher Institution | IN PROC. 2000 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION |
| Access Restriction | Open |
| Subject Keyword | On-chip Cmos Circuitry Diagonal Motion Non-symmetric Part Micromanipulation Task Squeeze Field Radial Field Cmos Electronics Manipulation Task New Tasklevel Micromanipulation Strategy Mem Micromechanisms Vector Field Operation Several Kind Overall Die Size Bimorph Organic Ciliary Array First Implementation Universal Field Drive Circuitry Programmable Mem Ciliary Actuator Array Actuator Gait New Low-level Control Algorithm Linear Translation Preliminary Experiment Uniquely Position |
| Content Type | Text |
| Resource Type | Article |
