NDLI: Fully programmable MEMS ciliary actuator arrays for micromanipulation tasks

Content Provider	IEEE Xplore Digital Library
Author	Suh, J.W. Darling, R.B. Bohringer, K.-F. Donald, B.R. Baltes, H. Kovacs, G.T.
Copyright Year	2000
Description	Author affiliation: Xerox Palo Alto Res. Center, CA, USA (Suh, J.W.)
Abstract	The first micromachined bimorph organic ciliary array with on-chip CMOS circuitry is presented. This device is composed of an 8/spl times/8 array of cells each having four orthogonally oriented actuators in on overall die-size of 9.4 mm/spl times/9.4 mm. The polyimide based actuators were fabricated directly above the selection and drive circuitry. Selection and activation of actuators in this array shows that integration was successful. The integration of CMOS electronics and MEMS micromechanisms allows the implementation of new task-level micromanipulation strategies. New low-level control algorithms (actuator gaits) were also demonstrated. The array was programmed to perform several kinds of manipulation tasks, including linear translation, diagonal motion, as well as vector field operations such as squeeze field and radial field orienting and centering. Preliminary experiments were also performed using thin silicon dice of about 3 mm/spl times/3 mm/spl times/0.5 mm size as the object being moved.
Starting Page	1101
Ending Page	1108
File Size	964367
Page Count	8
File Format	PDF
ISBN	0780358864
ISSN	10504729
DOI	10.1109/ROBOT.2000.844746
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-04-24
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Circuits Polyimides Electrostatic actuators Piezoelectric actuators Resistors Vectors Feedback Silicon Buildings
Content Type	Text
Resource Type	Article
Subject	Artificial Intelligence Control and Systems Engineering Electrical and Electronic Engineering Software

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