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SELECTIVE ETCHING METHOD FOR STACKED ORGANIC FILM BACKGROUND OF THE INVENTION 1. Field of the Invention
| Content Provider | Semantic Scholar |
|---|---|
| Author | Yazaa, Aayaayaa Z. A A. |
| Copyright Year | 2017 |
| Abstract | 54 SELECTIVE ETCHING METHOD FOR 5,271,800 12/1993 Koontz et al. .......................... 156/643 STACKED ORGANIC FILM 5,302.240 4/1994 Hori et al. ...... 156/643 5,632,910 5/1997 Nagayama . ... 216/47 75 Inventor: Jae Hee Ha, Cheongju, Rep. of Korea 5,679,499 10/1997 Yamamori ... ... 430/56 5,807,790 9/1998 Gupta et al. ............................ 438/725 73 Assignee: LG Semicon Co., Ltd., Cheongju, Rep. of Korea |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/92/cd/3c/2460e02599dfc6/US5976395.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |