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METHOD AND APPARATUS FOR ETCHING OF SILICON MATERLALS BACKGROUND OF THE INVENTION 1. Field of the Invention
| Content Provider | Semantic Scholar |
|---|---|
| Author | Yamada, Yuji |
| Copyright Year | 2017 |
| Abstract | 54 METHOD AND APPARATUS FOR ETCHING 4,310,380 1/1982 Flamm et al. .......................... 156/643 OF SILICON MATERIALS 4,498,953 2/1985 Cook et al. ............................. 156/646 4,749,440 6/1988 Blackwood et al. .................... 156/646 5,288,333 2/1994 Tanaka et al. ............................ 134/31 75 Inventors: Miyuki Takenaka; Yuji Yamada; Masaru Hayashi; Hideki Matsunaga; Akira Okada, all of Kanagawa, Japan |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/38/09/1a/a9d5543294090c/US6077451.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |