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Effect of undercut on the resonant behaviour of silicon nitride cantilevers
| Content Provider | Scilit |
|---|---|
| Author | Gavan, K. Babaei van der Drift, E. W. J. M. Venstra, W. J. Zuiddam, M. R. van der Zant, H. S. J. |
| Copyright Year | 2009 |
| Description | Journal: Journal of Micromechanics and Microengineering |
| Related Links | https://repository.tudelft.nl/islandora/object/uuid:72e2e21a-9191-4910-bb15-48bd2ea18ad6/datastream/OBJ/download |
| ISSN | 09601317 |
| e-ISSN | 13616439 |
| DOI | 10.1088/0960-1317/19/3/035003 |
| Journal | Journal of Micromechanics and Microengineering |
| Issue Number | 3 |
| Volume Number | 19 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2009-01-30 |
| Access Restriction | Open |
| Subject Keyword | Journal: Journal of Micromechanics and Microengineering Peripheral Vascular Disease |
| Content Type | Text |
| Resource Type | Article |
| Subject | Nanoscience and Nanotechnology Mechanics of Materials Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering |