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A silicon condenser microphone with a silicon nitride diaphragm and backplate
| Content Provider | Scilit |
|---|---|
| Author | Scheeper, P. R. Olthuis, W. Bergveld, P. |
| Copyright Year | 1992 |
| Description | Journal: Journal of Micromechanics and Microengineering A new condenser microphone design, which can be fabricated using the sacrificial layer technique, is proposed and tested. The microphone backplate is a 1 mu m PECVD silicon nitride film with a high density of acoustic holes (120-525 holes $mm^{-2}$), covered with a thin Ti/Au electrode. Microphones with a 1.5*1.5 mm diaphragm show a flat frequency response between 100 Hz and 14 kHz and a sensitivity of about 2 mV $Pa^{-1}$ using a bias voltage of 16 V. These values are comparable to those of other silicon microphones with highly perforated backplates. The major advantage of the new microphone design is that it can be fabricated on a single wafer so that no bonding techniques are required. |
| Related Links | http://iopscience.iop.org/article/10.1088/0960-1317/2/3/016/pdf |
| Ending Page | 189 |
| Page Count | 3 |
| Starting Page | 187 |
| ISSN | 09601317 |
| e-ISSN | 13616439 |
| DOI | 10.1088/0960-1317/2/3/016 |
| Journal | Journal of Micromechanics and Microengineering |
| Issue Number | 3 |
| Volume Number | 2 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 1992-09-01 |
| Access Restriction | Open |
| Subject Keyword | Journal: Journal of Micromechanics and Microengineering Frequency Response |
| Content Type | Text |
| Resource Type | Article |
| Subject | Nanoscience and Nanotechnology Mechanics of Materials Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering |
