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3D silicon electrostatic microactuator
| Content Provider | Scilit |
|---|---|
| Author | Tirole, N. Hauden, D. Blind, P. Froelicher, M. Gaudriot, L. |
| Copyright Year | 1993 |
| Description | Journal: Journal of Micromechanics and Microengineering The fabrication of a 3D silicon linear microactuator is presented. This actuator is realized by anisotropic chemical etching of a (110) oriented silicon wafer. The silicon monolithic structure of the microactuator is constituted by a fixed part bonded on a glass substrate and a movable part suspended by two elastic beams. The displacement of the movable part is consequently frictionless and is obtained by electrostatic forces. Some mechanical and electrostatic tests are presented. Moreover, with the aim of using this device for microscopy applications, some results have been achieved concerning the isotropic etching of tips on a (110) oriented silicon wafer. It would therefore be possible to integrate a tip onto a movable part for effective application in atomic force or scanning tunneling microscopy. |
| Related Links | http://iopscience.iop.org/article/10.1088/0960-1317/3/3/016/pdf |
| Ending Page | 157 |
| Page Count | 3 |
| Starting Page | 155 |
| ISSN | 09601317 |
| e-ISSN | 13616439 |
| DOI | 10.1088/0960-1317/3/3/016 |
| Journal | Journal of Micromechanics and Microengineering |
| Issue Number | 3 |
| Volume Number | 3 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 1993-09-01 |
| Access Restriction | Open |
| Subject Keyword | Journal: Journal of Micromechanics and Microengineering |
| Content Type | Text |
| Resource Type | Article |
| Subject | Nanoscience and Nanotechnology Mechanics of Materials Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering |
