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HVEM studies of nitride film edge induced defect generation in silicon substrates
| Content Provider | Scilit |
|---|---|
| Author | Vanhellemont, J. Claeys, C. Landuyt, J. Van |
| Copyright Year | 2021 |
| Description | Book Name: Microscopy of Semiconducting Materials, 1987 |
| Related Links | https://content.taylorfrancis.com/books/download?dac=C2006-0-04292-6&isbn=9781003069621&format=googlePreviewPdf |
| Ending Page | 444 |
| Page Count | 6 |
| Starting Page | 439 |
| DOI | 10.1201/9781003069621-70 |
| Language | English |
| Publisher | Informa UK Limited |
| Publisher Date | 2021-01-31 |
| Access Restriction | Open |
| Subject Keyword | Book Name: Microscopy of Semiconducting Materials, 1987 Metallurgy and Metallurgical Engineering Film Edge Defects Silicon Hvem Illustrated Theoretical Dislocation Orientation Basic |
| Content Type | Text |
| Resource Type | Chapter |