NDLI: Detection of Arsenic Dopant Atoms in Silicon Crystal by Aberration Corrected Scanning Transmission Electron Microscope

Content Provider	Scilit
Author	Oshima, Y. Hashimoto, Y. Sawada, H. Hashikawa, N. Asayama, K. Kondo, Y. Tanishiro, Y. Takayanagi, K.
Copyright Year	2009
Related Links	https://www.cambridge.org/core/services/aop-cambridge-core/content/view/AA3A977199EEB9877DBAA62C2492D024/S1431927609095233a.pdf/div-class-title-detection-of-arsenic-dopant-atoms-in-silicon-crystal-by-aberration-corrected-scanning-transmission-electron-microscope-div.pdf
Ending Page	1489
Page Count	2
Starting Page	1488
ISSN	14319276
e-ISSN	14358115
DOI	10.1017/s1431927609095233
Journal	Microscopy and Microanalysis
Issue Number	S2
Volume Number	15
Language	English
Publisher	Cambridge University Press (CUP)
Publisher Date	2009-07-01
Access Restriction	Open
Subject Keyword	Microscopy and Microanalysis
Content Type	Text
Resource Type	Synopsis
Subject	Instrumentation

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Detection of Arsenic Dopant Atoms in Silicon Crystal by Aberration Corrected Scanning Transmission Electron Microscope