NDLI: Fabrication of microparabolic reflector for infrared antenna coupled detectors

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The Journal of Engineering

Fabrication of microparabolic reflector for infrared antenna coupled detectors

Content Provider	IET Digital Library
Author	Mubarak, Mohamed H. Sidek, Othman Rahman, Mohamed R. Abdel Mustaffa, Mohamed Tafir Kamal, Ahmed Shukri Mustapa Mukras, Saad M.
Abstract	The fabrication process of a microparabolic reflector using isotropic xenon difluoride Xe F 2 etching technique is presented and analysed through this work for developing infrared antenna-coupled detectors. Although many parametric studies described the behaviour of this process in the literature, the non-linearity of the process and its dramatic dependency on the pattern definition result in great difficulties when adopting the process for developing a particular structure. The main focus of this work is, therefore, to present a detailed etching analysis as dictated in the proposed design providing the proper etching recipe according to the proposed structure design and its associated masking pattern. Deep insights into the process have been highlighted suggesting the necessity of the process assessment in terms of evaluating the three-dimensional etched volume rather than the etched depth. This will potentially solve the non-linearity behaviour and the pattern dependency problem. The optimum etching recipe yields approximately a total volume of 0.354 mm3 through the proper patterning mask. The resultant parabolic cavities have 75 and 13 μ m in their diameter and depth, respectively, as required for the proposed structure. The integration of a microparabolic reflector with such detectors will potentially enhance the specific detectivity of these detectors.
Starting Page	1343
Ending Page	1348
Page Count	6
Volume Number	13
e-ISSN	17500443
Issue Number	Issue 9, Sep (2018)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/mnl/13/9
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/mnl.2017.0826
Journal	Micro & Nano Letters
Publisher Date	2018-09-01
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	Bolometers Detection of Radiation Etching Etching Technique Infrared Antenna Coupled Detector Infrared Detector Isotropic Xenon Difluoride Masking Pattern Masks Micro-optical Device And Technology Micro-optics Microparabolic Reflector Optical Fabrication Optimum Etching Recipe Pattern Dependency Problem PhotoDetector Photoelectric Cell Proper Etching Recipe Proper Patterning Mask Reflector Antenna Resultant Parabolic Cavities Structure Design Submillimetre Wave Detection Surface Grinding XeF2 Xenon Compound
Content Type	Text
Resource Type	Article

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