NDLI: Measurement of the dynamic response of MEMS thermal actuators based on blurred still images by wavelet transform

Content Provider	IET Digital Library
Author	Li, Xiuyuan Zhao, Yulong Hu, Tengjiang Cheng, Rongjun Bai, Yingwei
Abstract	A novel method to experimentally determine the dynamic response of MEMS thermal actuators based on blurred still images of motion is presented. The apex displacement of thermal actuators proves to be a first-order linear system, whose dynamic response is depended on the system coefficient. In the frequency domain, the system coefficient of actuators excited by sinusoidal wave can be obtained from the fitted curve of vibration amplitude against frequency. An improved wavelet transform detection algorithm is proposed to acquire the vibration amplitude from blurred images taken by an ordinary camera. Compared with the conventional optical measurement method, the proposed method uses only still images instead of complex laser and optical reflecting systems, which has great potential for wide application. For the actuator in this study, the measured response time by blurred images and high-speed camera method are 14.87 and 15.25 ms with a deviation of 2.5%, which indicates the proposed method can obtain sufficient accurate results without sophisticated equipment and high cost.
Starting Page	570
Ending Page	576
Page Count	7
ISSN	17518822
Volume Number	10
e-ISSN	17518830
Issue Number	Issue 6, Sep (2016)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/iet-smt/10/6
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/iet-smt.2015.0292
Journal	IET Science, Measurement & Technology
Publisher Date	2016-09-01
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	Blurred Still Image Camera Design And Modelling of MEMS And NEMS Device Dynamic Response Dynamic Response Measurement First-order Linear System Fitted Curve Frequency Domain Function Theory And Analysis High-speed Camera Image Sonsor Integral Transforms in Numerical Analysis MEMS Thermal Actuators Microactuators Micromechanical And Nanomechanical Device And System Photography, Photographic Instrument And Technique Sinusoidal Wave Vibration Amplitude Vibrations Wavelet Transform
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Electrical and Electronic Engineering

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