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Two-dimensional silicon-on-glass actuator combined with a dispensed polymer microlens

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The Journal of Engineering

Two-dimensional silicon-on-glass actuator combined with a dispensed polymer microlens

Content Provider	IET Digital Library
Author	Li, Pei Pan, Longfa Zappe, Hans
Abstract	Actuators for objective lens positioning are indispensable components for writing and reading data to and from optical storage media. Significant advances in the technical capabilities of microlens actuators for optical heads have been achieved using MEMS technology, enabling miniaturisation and integration of optical data storage systems. In this reported work, a compact silicon-on-glass (SOG) actuator for two-dimensional (2D) positioning of a dispensed polymer microlens is developed by MEMS technology. A wafer-level process for fabrication of the SOG actuator is achieved using anodic bonding, in which a Pyrex wafer was bonded with an ultra-thin silicon wafer. Dispensed polymer microlenses are fabricated and subsequently integrated onto the 2D actuator by an automatic handling system. Typical displacements of about ±28.6 μm in the tracking direction and 3.2 μm in the focusing direction are experimentally characterised. The compact 2D SOG actuator and assembly technology may be particularly useful for expanding the application area for the optical head.
Starting Page	606
Ending Page	608
Page Count	3
Volume Number	8
e-ISSN	17500443
Issue Number	Issue 10, Oct (2013)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/mnl/8/10
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/mnl.2013.0248
Journal	Micro & Nano Letters
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	2D Actuator 2D SOG Actuator Actuators Anodic Bonding Assembly Technology Automatic Handling System Bonding Processes Compact Silicon-on-glass Actuator Dispensed Polymer Microlenses Fabrication of MEMS And NEMS Device General Fabrication Technique Glass MEMS Technology Micro-optical Device And Technology Microactuators Microlens Actuators Microlenses Objective Lens Positioning Optical Data Storage System Optical Heads Optical Storage Optical Storage And Retrieval Optical Storage Media Pyrex Wafer Reading Data Silicon Technical Capability Two-dimensional Positioning Two-dimensional Silicon-on-glass Actuator Typical Displacements Ultra-thin Silicon Wafer Wafer-level Process Writing Data
Content Type	Text
Resource Type	Article

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