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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Man Kit Law Ka Cheong Chiang Qingsong Xu |
| Copyright Year | 2015 |
| Description | Author affiliation: Dept. of Electromech. Eng., Univ. of Macau, Macao, China (Man Kit Law; Ka Cheong Chiang; Qingsong Xu) |
| Abstract | This paper presents the design, analysis, fabrication, and experimental testing of a two-axis micro-motion machine dedicated to precision alignment applications. The designed machine features a long alignment distance over ±5 mm in each axis and a well decoupling motion in the two axes. The design is devised using metal flexure mechanisms based on multistage leaf spring, which allows a precise movement without friction. Two voice coil motors are used to produce the two-axis motion. The flexure mechanism design is validated by finiteelement analysis (FEA) simulation study. Results confirm that the mechanism can provide over ±7 mm motion without failure in each axis. Moreover, a prototype machine is fabricated via EDM process. A series of experimental studies are performed on the prototype by using LabVIEW software. Experimented results demonstrate the satisfactory performance of the developed machine. |
| Starting Page | 958 |
| Ending Page | 963 |
| File Size | 1147906 |
| Page Count | 6 |
| File Format | |
| e-ISBN | 9781467391047 |
| DOI | 10.1109/ICInfA.2015.7279425 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2015-08-08 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Solid modeling Design automation Force Aluminum XZ micropositioning stage decoupling Prototypes Precision alignment Safety flexure hinge FEA simulation Stress |
| Content Type | Text |
| Resource Type | Article |
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