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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Ichiki, M. Lulu Zhang Zhen Yang Ikehara, T. Maeda, R. |
| Copyright Year | 2003 |
| Description | Author affiliation: Nat. Inst. of Adv. Ind. Sci. & Technol, Tsukuba, Japan (Ichiki, M.; Lulu Zhang; Zhen Yang; Ikehara, T.; Maeda, R.) |
| Abstract | This paper presents a three-dimensional micro fabrication and integration technology of smart materials for MEMS by spray coating method. It is shown that SCM is proved most effective in additional deposition on non-planar surface. PZT film is formed both on flat and non-flat surface and its thickness is around 1 /spl mu/m. Perovskite structure is formed in suitable heat treatment. Ferroelectric P-E hysteresis loop is also obtained. This paper is the first report on deposition of smart materials for MEMS with use of spray coating method from our group and also other researchers. Spray coating method has been proposed for three-dimensional coating method. It is also possible for spray coating method to deposit piezoelectrics, pyroelectrics, magnetics, etc., for sensor and/or actuator after improvement of system construction. Hydrophilic and hydrophobic properties between substrate surface and ejected liquid are most essential process factor of spray coating method in order to improve the film growth condition. |
| Sponsorship | TIMA-CNRS-INPG-UJF IEEE IEEE Comput. Soc. Test Technol. Tech. Council |
| Starting Page | 300 |
| Ending Page | 303 |
| File Size | 382164 |
| Page Count | 4 |
| File Format | |
| ISBN | 078037066X |
| DOI | 10.1109/DTIP.2003.1287057 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2003-05-07 |
| Publisher Place | France |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Fabrication Micromechanical devices Heat treatment Ferroelectric films Ferroelectric materials Spraying Magnetic hysteresis Transistors Coatings Surface treatment |
| Content Type | Text |
| Resource Type | Article |
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