NDLI: The impact of MEMS and NEMS on biotechnology in the 21st century

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2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

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Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003.

Design, Test, Integration and Packaging of MEMS/MOEMS 2003 (IEEE Cat. No.03EX713)

The impact of MEMS and NEMS on biotechnology in the 21st century

Systematic design of microstructures by topology optimization

Non destructive evaluation in micro dimensions

Mixed system and component level T-CAD for micro fabrication

Electromechanical and electromagnetic analyses of two- and three-plate voltage-controlled oscillators (VCOs) with micromachined tunable capacitors

Electro-thermal simulation of MEMS elements

Behavioral modeling and simulation of micromechanical resonator for communications applications

Electronic test solutions for FlowFET fluidic arrays

Development of a 3D-CAD add-in for tolerance analysis and synthesis in micro systems (/spl mu/-ToAST)

Understanding faulty behavior of a peristaltic micropump

Design process supporting simulations on wafer level packages

On-chip testing of MEMS using pseudo-random test sequences

VHDL-AMS modelling, simulation and testing of electrostatic micromotors

A compact MCM implementation of an embedded system for automotive applications

A mixed-mode interface circuit for gas sensor control and measure

A study of electronic interface for MEMS Variable Optical Attenuator (VOA)

Parameter identification and macromodeling of hysteresis phenomena

Construction kit for microoptical systems on the basis of microoptical benches

Calculation of partial capacitances using a modified iterative complex image method

A CMOS low noise amplifier for biomedical telemetry applications

An approach of lateral RF MEMS switch for high performance

Parallel-beams/lever electrothermal out-of-plane actuator

Study and realisation of a micromechanical relay for use in a harsh environment

Integrated multistage MEMS-based optical switch

Three-dimensional MEMS simulation using Euler parameters

A new computational method for piezoelectric plate modeling: application to membrane microsensors

Design and simulation of MEMS optical crossconnect with integrated nanophotonic crystals technology

Construction of nonlinear dynamic MEMS component models using Cosserat theory

A generalized computational formulation and model for transport and stoichiometry of multivalent weak analytes in Capillary Electrophoresis techniques

Theoretical aspects concerning the calculus possibilities of magnetic fluid core coils

Application of the "Multi Architecture Modeling" design method to system level MEMS simulation

Design and modelling of a microsensor for atmospheric electric field measurement

Computer aided design of a radiometric system for material sheet production

Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror

A new methodology for modeling MEMS Structures

The hierarchical HDL-based design of an integrated MEMS-CMOS oscillator

Dynamics modeling of microbeams under electrostatic load

Design and characterisation of a low-power micromachined spatial light modulator

Process stress estimation for MEMS RF switches with mixed analytical and numerical simulation

Model-based optimization of Medical Test Strips

3D silicon turning micromirror

Evaluation of principal characteristics of circular resonator in thin film applications

Thermal and mechanical simulation of bulk resonators

Analysis, and optimization of a CMOS vertical thermal actuator

Numerical simulation of hydrogel-based pH-responsive biosensors in BioMEMS

Capacitive humidity sensor using a polyimide sensing film

"Plug-up"-a new concept for fabricating SOI MEMS devices

A novel drie fabrication process development for SOI-based MEMS devices

Wafer-scale 0-level packaging of (RF-)MEMS devices using BCB

Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process

Testing of a LIGA-microspectrometer for monitoring dissolved nickel concentration when etching nickel and its alloys in aqueous ferric chloride solutions

Soldered sealing process to assemble a protective cap for a MEMS CSP

Dielectric miceocavity resonators based on silicon mold

Bonding of polymer microstructures by UV irradiation and welding at low temperatures

SU8 resist plasma etching and its optimisation

New aspects of simulation in hot-embossing

A new electroforming technology in aid of pressure for LIGA process

On-wafer electro-mechanical characterization of silicon MEMS switches

A novel self-sensitive SFM for nondestructive measurement of tiny vertical surfaces with restricted access

Design and fabrication of a peristaltic micropump

Production metrology for MEMS characterization

Thin film formation-a fabrication on non-planar surface by spray coating method

Hot embossing characteristics of PEEK compared to PC and PMMA

Quantitative study of the 'M.E.M.S.N.A.S.' process for 3D microfabrication using binary lithography

Ion track lithography: novel low-cost process to form deep vertical and high aspect ratio MEMS in flexible laminates

Ensuring reliability and repeatability in LIGA mold insert fabrication

Fracture behaviour of single crystal silicon microstructures

Modular parametric finite element modelling for reliability-studies in electronic and MEMS packaging

Mechanical qualification of RF-filters for space applications

Getters films at wafer level for wafer to wafer bonded MEMS

Fabrication sub-micron gratings based on embossing

Microfabrication of electroplated integrated chromium tips onto a silicon actuator

Hexagonal microlens array fabricated by proximity printing via UV lithography

Fabrication comb-drive device by MEMS and electroplating

A novel method for determining Young's modulus of thin films by micro-strain gauges

SU-8 process for biomedical inspection /spl mu/-carriers

P/sup +/ silicon recessed micromechanical structures for MEMS applications

A novel electrically controlled flexible liquid micro lens

Analysis of failure modes and mechanisms in thermally actuated micromachined relays for harsh environments space applications

Yield strength of thin-film parylene-c

Manufacturing of micro electrodes using ultra sonic aided electrochemical machining

Stress characterization of electroplated gold layers for low temperature surface micromachining

Feasibility of a flip chip approach to integrate an IR filter and an IR detector in a future gas detection cell

The impact of MEMS and NEMS on biotechnology in the 21st century

Content Provider	IEEE Xplore Digital Library
Author	Madou, M.
Copyright Year	2003
Description	Author affiliation: California Univ., Irvine, CA, USA (Madou, M.)
Abstract	The combination of natural polymers such as proteins and nucleic acids with MEMS and NEMS promises the advent of a totally new class of devices such as sensors and actuators with applications in diagnostics, responsive drug delivery, biocompatibility, self-assembly etc. This combination has become possible as today both top-down traditional manufacturing (e.g., MEMS and NEMS) and novel bottom-up manufacturing can realize components overlapping in size. Examples to illustrate the tremendous potential of merging top-down and bottom-up manufacturing techniques will be presented. These examples are called from the fields of molecular diagnostics, responsive drug delivery systems, protein and DNA structural elements and sensors and actuators and molecular self-assembly.
Sponsorship	TIMA-CNRS-INPG-UJF IEEE IEEE Comput. Soc. Test Technol. Tech. Council
File Size	39039
File Format	PDF
ISBN	078037066X
DOI	10.1109/DTIP.2003.1286996
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-05-07
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Proteins Biotechnology Actuators Self-assembly Nanoelectromechanical systems Drug delivery Manufacturing Polymers Biosensors
Content Type	Text
Resource Type	Article

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