NDLI: Mechanical qualification of RF-filters for space applications

Content Provider	IEEE Xplore Digital Library
Author	Lafontan, X. Kuchenbecker, J. Guillon, B. Pons, P. Nerin, P. Pressecq, F. Dardalhon, M. Rigo, S.
Copyright Year	2003
Description	Author affiliation: MEMSCAP, Crolles, France (Lafontan, X.)
Abstract	Micromachined RF-filters for Millimeter wave communications are expected to replace the actual bulky off-chip filters since they offer high performances at low cost. Nevertheless, their large aspect ratio between area (several mm/sup 2/) and their thickness (a few microns) may make them sensitive to mechanical stress such as vibrations or shocks. In this paper, we focus on their mechanical characteristics. The studied filters are built on a thin SiO/sub 2//Si/sub x/N/sub y/ dielectric membrane and the signal lines are in gold. This composition of material makes the analytical approach rapidly complex. So, in counterparts, we ran FEM simulations to study the influence of process parameters such as stress on flexion modes. Then, we measured by vibrometry the natural resonant frequency of several filter sizes (from 1 mm/sup 2/ up to 70 mm/sup 2/) and compared results with previous simulations. Finally, we applied at die level, standard procedures of shock and vibration used for space qualification. All the membranes withstood the tests without structural damage.
Sponsorship	TIMA-CNRS-INPG-UJF IEEE IEEE Comput. Soc. Test Technol. Tech. Council
Starting Page	341
Ending Page	345
File Size	427703
Page Count	5
File Format	PDF
ISBN	078037066X
DOI	10.1109/DTIP.2003.1287064
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-05-07
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Vibrations Gold Filters Costs Electric shock Biomembranes Dielectrics Millimeter wave communication Stress Qualifications
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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