NDLI: Steiner Tree Based Routing Algorithm in Consideration of Optical Proximity Correction

Content Provider	IEEE Xplore Digital Library
Author	Wei Zhang Yici Cai Qiang Zhou Xianlong Hong
Copyright Year	2006
Description	Author affiliation: Dept. of Comput. Sci. & Technol., Tsinghua Univ., Beijing (Wei Zhang; Yici Cai; Qiang Zhou; Xianlong Hong)
Abstract	As the technology migrates into ultra deep sub-micron era, the critical dimension of the circuits has become smaller than the lithographic wavelength. Due to the unavoidable diffraction and interaction phenomena of sub-wavelength technologies, the deformations between the image on wafer and layout have become one of the major factors in performance and yield rate. Optical proximity correction is one of the critical compensation methodologies to correct the deformations as a post layout process. But the results rely much on the original layout and the process is quite time-consuming. This paper presents a detailed router that considers the optical effect in the routing algorithm. The light diffraction is pre-calculated and stored in look-up tables. These costs are used as a weight to guide the sequential routing. The constructed force directed Steiner tree routing is used to enhance routing efficiency. Experiments were done on industrial instances and results showed an efficient run-time and improvements on optical effects
Sponsorship	IEEE Circuits and Syst. Soc. HKUST UESTC City Univ. of Hong Kong
Starting Page	2424
Ending Page	2428
File Size	5150755
Page Count	5
File Format	PDF
ISBN	0780395840
DOI	10.1109/ICCCAS.2006.285166
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-06-25
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Computer science Integrated circuit technology Costs Optical diffraction Runtime Computational fluid dynamics Lithography Optical distortion Routing Spatial databases
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in