NDLI: A Catalytic Sensor using MEMS process for Methane Detection in Mines

Content Provider	IEEE Xplore Digital Library
Author	Xiao-Qing Lv Zheng-Yong Zhang De-Yi Kong
Copyright Year	2007
Description	Author affiliation: Univ. of Sci. & Technol. of China, Hefei (Xiao-Qing Lv)
Abstract	Detection of methane is a vital aspect of environment security in coal mining. At present, catalytic sensors are widely used. A new structure sensor of methane gas had been designed and fabricated. The Pt resistance for temperature and heater is on the silicon membrane with micro air bridge structure. The sensor has advantages of simple structure, easy processing and high accuracy compared to normal sensors. The sensitive element is a platinum temperature sensor that measures the heat of combustion liberated as the combustible analyte is oxidized on its catalytic surface covered with a layer of doped porous alumina. Sputtering technique, lithography and so on are mainly adopted to fabricate the element's Pt film heating resistance. The fabrication of the heating resistance is a crucial step in this experiment. The heating resistances are completed under all- same technique. So the heating resistances' value will be in good concordance. Methane generally needs high temperature to support its normal work. To meet this temperature region, the element's power consumption will be high if the element's body resistance is big. In order to decrease the element's power consumption, it is necessary to decrease the body resistance. As the traditional sensitive element, to get high sensitivity, it is necessary to put some catalyst into the sensitive film material as $PdCl_{2}.$ Because of micro-fabrication (MEMS) techniques, catalytic sensors are likely to be smaller and more lower power consumption.
Starting Page	4
Ending Page	9
File Size	4525990
Page Count	6
File Format	PDF
ISBN	1424412196
DOI	10.1109/ICIA.2007.4295687
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-07-08
Publisher Place	South Korea
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Temperature sensors catalytic gas sensor Energy consumption Bridge circuits methane in mine Silicon Biomembranes Security Gas detectors Immune system Resistance heating
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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