NDLI: A Quartz tuning fork-based humidity sensor using Nanocrystalline Zinc oxide thin film coatings

Content Provider	IEEE Xplore Digital Library
Author	Xiaofeng Zhou Tao Jiang Jian Zhang Jianzhong Zhu Xiaohua Wang Ziqiang Zhu
Copyright Year	2006
Description	Author affiliation: Dept. of Electr. Eng., East China Normal Univ., Shanghai (Xiaofeng Zhou; Tao Jiang; Jian Zhang; Jianzhong Zhu; Xiaohua Wang; Ziqiang Zhu)
Abstract	This paper describes an application of quartz tuning forks (QTF) coated with nanocrystalline ZnO films used as relative humidity sensors. The nanocrystalline ZnO thin films were deposited on the QTF by sol-gel method. The film was characterized by X-Ray Diffraction (XRD) and Atomic Force Microscope (AFM) to obtain the information on the structural and morphological properties. And the humidity sensitivity characteristics of the sensors have been investigated. Ethanol and acetone interference on the sensor performance have been also tested. Sensing experiments were examined by measuring the resonance frequency shift of QTF which due to the additional mass loading. The results showed that the sensors have high humidity sensitivity, good stability, fast response time, and well reproducibility. We demonstrate here a simple and low-cost humidity sensor using the QTF
Starting Page	1152
Ending Page	1157
File Size	3312406
Page Count	6
File Format	PDF
ISBN	1424405289
DOI	10.1109/ICIA.2006.305908
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-08-20
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Atomic force microscopy relative humidity Sensor phenomena and characterization X-ray diffraction Thin film sensors Zinc oxide thin film Coatings Sputtering sol-gel Vibrations X-ray scattering humidity sensor Humidity quartz tuning fork Zinc oxide
Content Type	Text
Resource Type	Article

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