NDLI: A MEMS BPSK demodulator: Micromechanical Mixing and Filtering using MetalMUMPs

Content Provider	IEEE Xplore Digital Library
Author	Scerri, J. Grech, I. Gatt, E. Casha, O.
Copyright Year	2013
Description	Author affiliation: Microelectron. & Nanoelectron. Dept., Univ. of Malta, Msida, Malta (Scerri, J.; Grech, I.; Gatt, E.; Casha, O.)
Abstract	In this paper two MEMS structures that are intended to demodulate a BPSK low data rate signal are compared. They are designed in conformity with the MetalMUMPs process. Target applications for such devices would be low-rate, wireless personal area networks (LR-WPANs) such as those described in the IEEE 802.15.4 standard onto which the ZigBee standard is built. The presented MEMS structures mix the Radio Frequency (RF) and Local Oscillator (LO) signals electrostatically and also filter this mixed signal prior to electrostatic sensing. These MEMS structures can also be used as the building blocks to demodulate higher order PSK schemes. The first structures' mode of vibration is torsional in nature and the use of torsional vibrations for BPSK demodulation is innovative. The first structure has an undamped resonant frequency of 2 MHz. The second structure is an extension of the first and is also supported on tethers exhibiting torsional vibrations. This structure resonates at 680 kHz.
Starting Page	113
Ending Page	116
File Size	402793
Page Count	4
File Format	PDF
ISBN	9781467345804
e-ISBN	9781467345811
DOI	10.1109/PRIME.2013.6603128
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-06-24
Publisher Place	Austria
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrodes Radio frequency Micromechanical devices Metals Resonant frequency mixer torsional osscilator PSK demodulator MEMS phase detector Binary phase shift keying Electrostatics
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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