NDLI: A coupled adaptive PI tuning method for rapid thermal processing systems

Content Provider	IEEE Xplore Digital Library
Author	Xia Su Xianxia Zhang
Copyright Year	2015
Description	Author affiliation: Shanghai Key Lab. of Power Station Autom. Technol., Shanghai Univ., Shanghai, China (Xia Su; Xianxia Zhang)
Abstract	A coupled adaptive PI tuning method for rapid thermal chemical vapor deposition systems (RTCVD) is proposed in this paper. RTCVD, as one of rapid thermal processing (RTP) craft, is the main method to produce polycrystalline silicon thin films. The temperature in the furnace is crucial to the quality of polycrystalline silicon thin films, which has great influence on semiconductor industries. To improve the quality of the films, a coupled adaptive PI tuning method based on simultaneous perturbation stochastic approximation (SPSA) algorithm is applied to the RTCVD systems. Simulation results show that satisfactory performances can be obtained using the proposed tuning method.
Starting Page	2231
Ending Page	2235
File Size	329105
Page Count	5
File Format	PDF
e-ISBN	9781467376822
DOI	10.1109/FSKD.2015.7382299
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-08-15
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Couplings Rapid thermal annealing Adaptive systems Heating RTCVD Approximation algorithms Silicon SPSA Tuning coupled adaptive PI tuning RTP
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

A coupled adaptive PI tuning method for rapid thermal processing systems