NDLI: Novel flat MIS electron emitter

Content Provider	IEEE Xplore Digital Library
Author	Govyadinov, A. Novet, T. Benning, P. Pidwerbecki, D. Ramamoorthi, S. Smith, J. Otis, C. Neiman, D. Chen, J.
Copyright Year	2004
Description	Author affiliation: Hewlett-Packard Co., Corvallis, OR, USA (Govyadinov, A.; Novet, T.; Benning, P.; Pidwerbecki, D.; Ramamoorthi, S.; Smith, J.; Otis, C.; Neiman, D.; Chen, J.)
Abstract	The flat metal-insulator-semiconductor (MIS) electron emitter is a simple design allowing easy manufacture, and is relatively insensitive to environment conditions making operation possible in poor vacuum conditions. A stack of 5000 /spl Aring/ polysilicon/150 /spl Aring/ silicon oxide/50 /spl Aring/ gold deposited on n++ doped silicon showed the best performance. We have observed emission current densities as high as 2-10 A/cm/sup 2/ at efficiencies from 3-10%. The polysilicon serves a dual role. Bumps on the poly surface act as field-enhanced emission sites while the bulk of the film behaves as a ballast resistor that prevents run away emission from any one emission site. The thin gold layer self-assembles into a nano-mesh with >100 pores//spl mu/m/sup 2/ through which electrons escape. Emission theory, including energy distribution and angular divergence of the emitted beams, are discussed.
Sponsorship	Electrical Eng. and Comput. Sci. Dept. and Microsystems Technol. Lab. at MIT American Vacuum Soc. IEEE Electron Device Soc. Stellar Micro-Devices
Starting Page	216
Ending Page	217
File Size	188137
Page Count	2
File Format	PDF
ISBN	0780383974
DOI	10.1109/IVNC.2004.1354980
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-07-16
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electron guns Silicon Gold Metal-insulator structures Electron emission Electronic ballasts Resistors Manufacturing Dielectrics and electrical insulation Electron sources
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

MIS emitter with epitaxial CaF/sub 2/ layer as insulator

A Survey of Radiation-Induced Perturbations in Metal-Insulator-Semiconductor Structures

High Breakdown Voltage AlGaN/GaN MIS-HEMT with SiN and TiO/sub 2/ Gate Insulator

Super-gain silicon MIS heterojunction emitter transistors

The inside out field emission display

Tunnel transistor

Instabilities in Double Dielectric Structures

Micro Electron Gun with Silicon Micro Field Emitter

Electron Emission From Gated Pt Emitters Fabricated By Electron Beam Induced Deposition

Novel flat MIS electron emitter

Similar Documents

MIS emitter with epitaxial CaF/sub 2/ layer as insulator

A Survey of Radiation-Induced Perturbations in Metal-Insulator-Semiconductor Structures

High Breakdown Voltage AlGaN/GaN MIS-HEMT with SiN and TiO/sub 2/ Gate Insulator

Super-gain silicon MIS heterojunction emitter transistors

The inside out field emission display

Tunnel transistor

Instabilities in Double Dielectric Structures

Micro Electron Gun with Silicon Micro Field Emitter

Electron Emission From Gated Pt Emitters Fabricated By Electron Beam Induced Deposition

Novel flat MIS electron emitter