NDLI: Field emission-from arrays of free-standing carbon nanotubes grown by ICP-CVD

Content Provider	IEEE Xplore Digital Library
Author	Tseng, S.C. Tsai, S.H. Yao, B.C. Lee, Y.K. Leou, K.C. Tsai, C.H.
Copyright Year	2004
Description	Author affiliation: Dept. of Eng. & Syst. Sci., Nat. Tsing Hua Univ., Hsin-Chu, Taiwan (Tseng, S.C.; Tsai, S.H.)
Abstract	Carbon nanotubes (CNTs) have been considered as a prime candidate material of cold cathode emitter for field emission (FE) application. No matter whether the cathode assembly is fabricated by screen printing or in-situ chemical vapor deposition (CVD), the strict requirement of high emission uniformity on a large area display panel still remains a great challenge. There have been a large amount of publications demonstrating the ability of growing large area patterned well-aligned multi-walled carbon nanotubes with uniform diameter and height by thermal CVD. The field emission performance however was hampered due to high carbon nanotube density (> 10/sup 8/ cm/sup -2/) and low emission density (/spl sim/10/sup 4/ cm/sup -2/), which is not attributed solely to the electrical field screening effect. In this report, we used electron beam lithography (EBL) followed by metal deposition/lift-off to define the position and size of nickel catalyst and grew CNTs using inductively-coupled plasma (ICP) CVD. The EBL has been proven to be a straight forward method to define an array of catalyst metal dots with designated size and inter-distance. The ICP-CVD has been shown to grow free-standing vertically-aligned CNTs with uniform diameter and height. And then a gripper-type nano-object manipulation assembly inside a scanning electron microscope (SEM) was utilized to measure the field emission from individual carbon nanotube.
Sponsorship	Electrical Eng. and Comput. Sci. Dept. and Microsystems Technol. Lab. at MIT American Vacuum Soc. IEEE Electron Device Soc. Stellar Micro-Devices
Starting Page	86
Ending Page	87
File Size	153353
Page Count	2
File Format	PDF
ISBN	0780383974
DOI	10.1109/IVNC.2004.1354911
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-07-16
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Carbon nanotubes Cathodes Assembly Scanning electron microscopy Organic materials Iron Printing Chemical vapor deposition Flat panel displays Large screen displays
Content Type	Text
Resource Type	Article

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