NDLI: Material's outgassing and surface modification of TiN coating film

Content Provider	IEEE Xplore Digital Library
Author	Xiaoyang Zheng Lihong Meng Xiwei Tong
Copyright Year	2015
Description	Author affiliation: Beijing Sevenstar Electron. Co., Ltd., Beijing, China (Lihong Meng; Xiwei Tong) \|\| Key Lab. of High Power Microwave Sources & Technol., Inst. of Electron., Beijing, China (Xiaoyang Zheng)
Abstract	In order to meet microwave devices' growing demand on material's vacuum properties, the author carries out preliminary exploration of the process of material's outgassing and its causes, the diffusion characteristics of different gases in material. It is pointed out that on the basis of maintaining its original physical and chemical properties, material's vacuum properties can be improved by surface modification. At last, this paper compares the volumes of the emitted gases of stainless steel coated by TiN film and stainless steel without TiN film, after they are both roasted by high temperature. The result confirms that the surface modification, TiN film can improve the vacuum properties of the material.
Starting Page	1
Ending Page	2
File Size	394544
Page Count	2
File Format	PDF
ISBN	9781479971091
e-ISBN	9781479971107
DOI	10.1109/IVEC.2015.7223942
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-04-27
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Tin Coatings Films Sputtering Surface discharges Surface treatment reactive sputtering surface modification outgassing ate
Content Type	Text
Resource Type	Article

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