NDLI: P2J-1 Love-Wave Characterization Platform for Micro and Nano Processed Thin Films

Content Provider	IEEE Xplore Digital Library
Author	Zimmermann, C. Rebiere, D. Dejous, C. Pistre, J.
Copyright Year	2006
Description	Author affiliation: Lab. IXL, Univ. Bordeaux, Talence (Zimmermann, C.; Rebiere, D.; Dejous, C.; Pistre, J.)
Abstract	Acoustic wave sensors uses more and more often micro and nano-structured thin film new materials (e.g. as sensitive layer). This lead to an increasing need for materials viscoelastic properties characterization. A new characterization method is proposed here using Love-wave platforms and allowing the material properties characterization directly with the sensor platform. A Love-wave device consists in a multilayer structure with a piezoelectric substrate, a guiding layer and, for chemical detections, a sensitive layer able to trap chemical species. Sensitive and guiding layers involve thin films organic and inorganic materials in which a 100 MHz Love-wave propagates during sensor operation. Materials are then excited at high frequency and mechanical properties are affected by the wave propagation. The characterization method determines material layer density and shear modulus by fitting simulation results to experimental measurements. First results concern the characterization of Love-wave $SiO_{2}$ guiding layer and demonstrate that using characterized $SiO_{2}$ density and shear modulus allows to simulate accurately the wave phase velocity of Love-wave devices with different $SiO_{2}$ guiding layer thicknesses
Starting Page	1809
Ending Page	1812
File Size	412567
Page Count	4
File Format	PDF
ISBN	1424402018
ISSN	10510117
DOI	10.1109/ULTSYM.2006.455
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-10-02
Publisher Place	Canada
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Transistors Thin film sensors Sensor phenomena and characterization Acoustic sensors Piezoelectric films Chemical sensors Acoustic waves Acoustic materials Viscosity Elasticity
Content Type	Text
Resource Type	Article

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