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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yamanouchi, K. Sakurai, N. Satoh, T. |
| Copyright Year | 1989 |
| Description | Author affiliation: Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan (Yamanouchi, K.; Sakurai, N.; Satoh, T.) |
| Abstract | The authors report a theoretical analysis of the surface-acoustic wave (SAW) propagation characteristics of ZnO/diamond and AlN/diamond structures. The analysis shows about 12000 m/s and a large electromechanical coupling coefficient K/sup 2/ of 0.03 for AlN thin film. The numerical analysis for the ZnO/diamond structure shows that there exists a coupling between the Rayleigh wave and the Sezawa wave at H/ lambda =0.2 and a complex dependency of K/sup 2/ on the thickness of ZnO film. The fabrication process of synthetic-diamond thin films is described, and experimental results on the SAW propagation characteristics are presented. With the thermal filament CVD (chemical vapor deposition) method, it is possible to obtain a diamond film on a Si substrate, but the surface of it is rough, and polishing is needed to make a fine pattern on it. |
| Starting Page | 351 |
| Ending Page | 354 |
| File Size | 257238 |
| Page Count | 4 |
| File Format | |
| DOI | 10.1109/ULTSYM.1989.67007 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1989-10-03 |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Surface acoustic waves Fabrication Zinc oxide Transistors Surface waves Numerical analysis Chemical vapor deposition Semiconductor films Substrates Rough surfaces |
| Content Type | Text |
| Resource Type | Article |
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