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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Wrobel, P. Stefaniuka, T. Wronkowska, A.A. Wronkowski, A. Szoplik, T. |
| Copyright Year | 2013 |
| Description | Author affiliation: Fac. of Phys., Univ. of Warsaw, Warsaw, Poland (Wrobel, P.; Stefaniuka, T.; Szoplik, T.) || Inst. of Math. & Phys., Univ. of Technol. & Life Sci., Bydgoszcz, Poland (Wronkowska, A.A.; Wronkowski, A.) |
| Abstract | Optical properties of ultra-smooth silver nanolayers fabricated with e-beam physical vapour deposition system on epi-polished silica and sapphire substrates are measured using spectroscopic ellipsometry method. Ag films of 100 nm thickness are deposited at 180 and 295 K directly on substrates as well as on intermediate 1 nm wetting layer of germanium. Different deposition rates are used for Ge (0.5 Å/s) and Ag (10 Å/s) films. Roughness of subsequent layers is measured with atomic force microscope and expressed in peak-to-peak and root-mean-square values. The Ge wetting layer considerably decreases roughness of Ag surface. Ellipsometric measurements made in the spectral range 193 nm - 2.2 μm (6.5 eV - 0.6 eV) for different incidence angles are interpreted using two-media model with interfaces air/Ag, Ag/silica or Ag/sapphire and three-media model with additional interfaces Ag/Ge and Ge/silica or Ge/sapphire. The RMS values of Ag surface roughness are used to model the intermix layer thickness at the air/Ag interface. The measurement spans a wide range of frequencies which are lower than the unscreened plasma frequency of bulk silver close to 9 eV. Plots of the imaginary part of permittivity of silver films versus photon energy are presented and discussed. |
| Starting Page | 1 |
| Ending Page | 4 |
| File Size | 660122 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781479906833 |
| ISSN | 21612064 |
| DOI | 10.1109/ICTON.2013.6603071 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2013-06-23 |
| Publisher Place | Spain |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Optical films Silver Optical imaging Optical refraction Surface morphology Adaptive optics Ag layer roughness plasmonics spectroscopic ellipsometry silver permittivity ultra-smooth Ag layers |
| Content Type | Text |
| Resource Type | Article |
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